Optical systems fabricated by printing-based assembly
View Patent ↗Provided are optical devices and systems fabricated, at least in part, via printing-based assembly and integration of device components. In specific embodiments the present invention provides light emitting systems, light collecting systems, light sensing systems and photovoltaic systems comprising printable semiconductor elements, including large area, high performance macroelectronic devices. Optical systems of the present invention comprise semiconductor elements assembled, organized and/or integrated with other device components via printing techniques that exhibit performance characteristics and functionality comparable to single crystalline semiconductor based devices fabricated using conventional high temperature processing methods. Optical systems of the present invention have device geometries and configurations, such as form factors, component densities, and component positions, accessed by printing that provide a range of useful device functionalities. Optical systems of the present invention include devices and device arrays exhibiting a range of useful physical and mechanical properties including flexibility, shapeability, conformability and stretchablity.
1. A method of making a semiconductor-based optical system, said method comprising the steps of:
providing a device substrate having a receiving surface;
assembling a printable semiconductor element on said receiving surface of said substrate via contact printing; and
planarizing said printable semiconductor element assembled on said receiving surface, thereby making said semiconductor-based optical system, wherein said planarizing step generates a substantially planar top surface on said device substrate having said printable semiconductor element.
2. The method of claim 1 wherein said planarizing step comprises embedding said printable semiconductor element into said planarizing layer.
3. The method of claim 1 further comprising the step of curing, polymerizing or cross linking said planarizing layer having said printable semiconductor element embedded therein, thereby fixing said printable semiconductor element in said planarizing layer.
4. The method of claim 1 further comprising the steps of patterning one or more electrical interconnects to an exposed surface of said planarized printable semiconductor element of said substantially planar top surface.
5. The method of claim 1 wherein said printable semiconductor element is a printable electronic device or electronic device component.
6. The method of claim 1 wherein said printable semiconductor element is an LED, a laser, a solar cell, a sensor, a diode, a transistor, a p-n junction, an integrated circuit, or a photodiode.
7. The method of claim 1 wherein said printable semiconductor element comprises said semiconductor structure integrated with at least one additional structure selected from the group consisting of: another semiconductor structure;
a dielectric structure; conductive structure, and an optical structure.
8. The method of claim 1 wherein said printable semiconductor element comprises said semiconductor structure integrated with at least one electronic device component selected from the group consisting of: an electrode, a dielectric layer, an optical coating, a metal contact pad and a semiconductor channel.
9. The method of claim 1 wherein said printable semiconductor element has a length selected from the range of 0.0001 millimeters to 1000 millimeters, a width selected from the range of 0.0001 millimeters to 1000 millimeters and a thickness selected from the range of 0.00001 millimeters to 3 millimeters.
10. The method of claim 1 wherein said printable semiconductor element comprises a semiconductor structure having a length selected from the range of 0.02 millimeters to 30 millimeters, and a width selected from the range of 0.02 millimeters to 30 millimeters.
11. The method of claim 1 wherein said printable semiconductor element comprises a semiconductor structure having a length selected from the range of 0.1 millimeters to 1 millimeter, and a width selected from the range of 0.1 millimeters to 1 millimeter.
12. The method of claim 1 wherein said printable semiconductor element comprises a semiconductor structure having a length selected from the range of 1 millimeters to 10 millimeters, and a width selected from the range of 1 millimeter to 10 millimeters.
13. The method of claim 1 wherein said printable semiconductor element comprises a semiconductor structure having a thickness selected from the range of 0.0003 millimeters to 0.3 millimeters.
14. The method of claim 1 wherein said printable semiconductor element comprises a semiconductor structure having a thickness selected from the range of 0.002 millimeters to 0.02 millimeters.
15. The method of claim 1 comprising the steps:
assembling a plurality of printable semiconductor elements on said receiving surface of said substrate via contact printing; and
planarizing said plurality of printable semiconductor elements assembled on said receiving surface.
16. The method of claim 15 wherein said plurality of printable semiconductor elements comprises one or more electronic devices selected from the group consisting of: a LED, a laser, a solar cell, a sensor, a diode, a transistor, a p-n junction, an integrated circuit, and a photodiode.
17. The method of claim 1 further comprising the step of providing a planarizing layer on said receiving surface of said substrate, wherein said planarizing step comprises embedding said printable semiconductor element in said planarizing layer provided on said receiving surface of said device substrate.
18. The method of claim 17 wherein said planarizing layer is provided to said receiving surface prior to said step of assembling said printable semiconductor element on said receiving surface.
19. The method of claim 17 wherein said planarizing layer is provided to said receiving surface after said step of assembling said printable semiconductor element on said receiving surface.
20. The method of claim 17 wherein said planarizing layer has a thickness selected from the range of 10 nanometers to 1000 microns.
21. The method of claim 17 wherein said planarizing layer comprises a prepolymer or a polymer.
22. A method of making a semiconductor-based optical system, said method comprising the steps of:
providing an optical component having a receiving surface; and
assembling a printable semiconductor element on said receiving surface of said optical component via contact printing; wherein said printable semiconductor element comprises a semiconductor structure having a length selected from the range of 0.0001 millimeters to 1000 millimeters, a width selected from the range of 0.0001 millimeters to 1000 millimeters and a thickness selected from the range of 0.00001 millimeters to 3 millimeters;
wherein said optical component is an array of light collecting optical components, light concentrating optical components, light diffusing optical components, dispersing optical components or light filtering optical components and each of said components in said array is spatially aligned with respect to at least one of said printable semiconductor elements.
23. The method of claim 22 wherein said printable semiconductor element comprises a semiconductor structure having a length selected from the range of 0.02 millimeters to 30 millimeters, and a width selected from the range of 0.02 millimeters to 30 millimeters.
24. The method of claim 22 wherein said printable semiconductor element comprises a semiconductor structure having a length selected from the range of 0.1 millimeters to 1 millimeter, and a width selected from the range of 0.1 millimeters to 1 millimeter.
25. The method of claim 22 wherein said printable semiconductor element comprises a semiconductor structure having a length selected from the range of 1 millimeters to 10 millimeters, and a width selected from the range of 1 millimeter to 10 millimeters.
26. The method of claim 22 wherein said printable semiconductor element comprises a semiconductor structure having a thickness selected from the range of 0.0003 millimeters to 0.3 millimeters.
27. The method of claim 22 wherein said printable semiconductor element comprises a semiconductor structure having a thickness selected from the range of 0.002 millimeters to 0.02 millimeters.
28. The method of claim 22 comprising assembling a plurality of printable semiconductor elements on said receiving surface of said optical component via contact printing; wherein each of said printable semiconductor element comprises a semiconductor structure having a length selected from the range of 0.0001 millimeters to 1000 millimeters, a width selected from the range of 0.0001 millimeters to 1000 millimeters and a thickness selected from the range of 0.00001 millimeters to 3 millimeters.
29. The method of claim 22 wherein said optical component is selected from the group consisting of a lens, a lens array, a reflector, an array of reflectors, a waveguide, an array of waveguides, an optical coating, an array of optical coatings, an optical filter, an array of optical filters, a fiber optic element and an array of fiber optic elements.
30. The method of claim 22 wherein said optical component is a lens array fabricated by replica molding.
31. The method of claim 22 wherein each of said components in said array is individually addressed to at least one of said printable semiconductor elements.
32. The method of claim 22 wherein said printable semiconductor element is electronic devices or components of electronic devices.
33. The method of claim 22 wherein said printable semiconductor elements are one or more electronic device selected from the group consisting of: an LED, a laser, a solar cell, a sensor, a diode, a transistor, a p-n junction, an integrated circuit, and a photodiode.
34. The method of claim 22 wherein said printable semiconductor element comprises said semiconductor structure integrated with at least one additional structure selected from the group consisting of: another semiconductor structure;
a dielectric structure; conductive structure, and an optical structure.
35. The method of claim 22 wherein said printable semiconductor element comprises said semiconductor structure integrated with at least one electronic device component selected from the group consisting of: an electrode, a dielectric layer, an optical coating, a metal contact pad and a semiconductor channel.
36. The method of claim 22 wherein each of said printable semiconductor element has a thickness selected from the range of 100 nanometers to 100 microns.
37. The method of claim 22 wherein said printable semiconductor element is assembled on said receiving surface via dry transfer contact printing.
38. The method of claim 22 wherein said printable semiconductor element is assembled on said receiving surface using an elastomeric transfer device.
39. The method of claim 22 wherein said printable semiconductor element is assembled on said receiving surface using an elastomeric stamp.
40. The method of claim 22 further comprising the step of providing an adhesive layer or planarizing layer to said receiving surface of said optical component.
41. The method of claim 22 wherein said printable semiconductor element is assembled on said receiving surface using a conformable transfer device.
42. The method of claim 41 wherein said assembling step comprises:
providing said conformable transfer device having a contact surface;
establishing conformal contact between an external surface of said printable semiconductor element and said contact surface of said conformable transfer device, wherein said conformal contact bonds said printable semiconductor element to said contact surface;
contacting said printable semiconductor element bonded to said contact surface and said receiving surface of said optical component; and
separating said printable semiconductor element and said contact surface of said conformable transfer device, thereby assembling said printable semiconductor element on said receiving surface of said optical component.
43. A method of making a semiconductor-based optical system, said method comprising the steps of:
providing a device substrate having a receiving surface;
assembling a printable semiconductor element on said receiving surface of said substrate via contact printing;
providing a planarizing layer on said receiving surface of said substrate; and
planarizing said printable semiconductor element assembled on said receiving surface, thereby making said semiconductor-based optical system, wherein said planarizing step comprises embedding said printable semiconductor element in said planarizing layer provided on said receiving surface of said device substrate and said planarizing layer is provided to said receiving surface after said step of assembling said printable semiconductor element on said receiving surface.
44. A method of making a semiconductor-based optical system, said method comprising the steps of:
providing a device substrate having a receiving surface;
assembling a printable semiconductor element on said receiving surface of said substrate via contact printing;
providing a planarizing layer on said receiving surface of said substrate; and
planarizing said printable semiconductor element assembled on said receiving surface, thereby making said semiconductor-based optical system, wherein said planarizing step comprises embedding said printable semiconductor element in said planarizing layer provided on said receiving surface of said device substrate and said planarizing layer has a thickness selected from the range of 10 nanometers to 1000 microns.
45. A method of making a semiconductor-based optical system, said method comprising the steps of:
providing a device substrate having a receiving surface;
assembling a printable semiconductor element on said receiving surface of said substrate via contact printing; and
providing a planarizing layer on said receiving surface of said substrate; and
planarizing said printable semiconductor element assembled on said receiving surface, thereby making said semiconductor-based optical system wherein said planarizing step comprises embedding said printable semiconductor element in said planarizing layer provided on said receiving surface of said device substrate and said planarizing layer comprises a prepolymer of a polymer.
46. A method of making a semiconductor-based optical system, said method comprising the steps of:
providing a device substrate having a receiving surface;
assembling a printable semiconductor element on said receiving surface of said substrate via contact printing; and
providing a planarizing layer on said receiving surface of said substrate;
planarizing said printable semiconductor element assembled on said receiving surface, thereby making said semiconductor-based optical system wherein said planarizing step comprises embedding said printable semiconductor element in said planarizing layer provided on said receiving surface of said device substrate; and
curing, polymerizing or cross linking said planarizing layer having said printable semiconductor element embedded therein, thereby fixing said printable semiconductor element in said planarizing layer.
47. A method of making a semiconductor-based optical system, said method comprising the steps of:
providing an optical component having a receiving surface; and
assembling a printable semiconductor element on said receiving surface of said optical component via contact printing; wherein said printable semiconductor elements comprises a semiconductor structure having a length selected from the range of 0.0001 millimeters to 1000 millimeters, a width selected from the range of 0.0001 millimeters to 1000 millimeters and a thickness selected from the range of 0.00001 millimeters to 3 millimeters;
wherein said optical component is an array of light collecting optical components, light concentrating optical components, light diffusing optical components, dispersing optical components or light filtering optical components;
and each of said components in said array is individually addressed to at least one of said printable semiconductor elements.
48. A method of making a semiconductor-based optical system, said method comprising the steps of:
providing an optical component having a receiving surface; and
assembling a printable semiconductor element on said receiving surface of said optical component via contact printing; wherein said printable semiconductor elements comprises a semiconductor structure having a length selected from the range of 0.0001 millimeters to 1000 millimeters, a width selected from the range of 0.0001 millimeters to 1000 millimeters and a thickness selected from the range of 0.00001 millimeters to 3 millimeters;
wherein said printable semiconductor element is assembled on said receiving surface using a conformable transfer device and said assembling step comprises:
providing said conformable transfer device having a contact surface;
establishing conformal contact between an external surface of said printable semiconductor element and said contact surface of said conformable transfer device, wherein said conformal contact bonds said printable semiconductor element to said contact surface;
contacting said printable semiconductor element bonded to said contact surface and said receiving surface of said optical component; and
separating said printable semiconductor element and said contact surface of said conformable transfer device, thereby assembling said printable semiconductor element on said receiving surface of said optical component.
49. A semiconductor-based optical system comprising:
a device substrate having a receiving surface;
a planarizing layer supported by said receiving surface; and
a planarized printable semiconductor element supported by said receiving surface and embedded in said planarizing layer, wherein said printable semiconductor element has an exposed surface with a step edge that is less than or equal to 2 μm; wherein said device substrate having said printable semiconductor element has said substantially planar top surface that includes said printable semiconductor element, wherein said planarized printable semiconductor element comprises a semiconductor structure having a length selected from the range of 0.0001 millimeters to 1000 millimeters, a width selected from the range of 0.0001 millimeters to 1000 millimeters and a thickness selected from the range of 0.00001 millimeters to 3 millimeters.