Granted Patent B2

US 7,947,592 · App. 12/012,120 · Granted May 24, 2011

Abstract

Claims (59)

1. A process for providing a power metal interconnection ( 115 ) with a metal cap ( 117 / 118 ) on a substrate ( 100 ) having at least one exposed interconnect metal feature ( 107 ), said process comprising the steps of:

(a) depositing at least one dielectric layer ( 112 ) over said at least one exposed interconnect metal feature ( 107 ) and said substrate ( 100 );

(b) defining a photolithographic pattern for at least one power metal interconnect ( 115 ) over said substrate ( 100 ), and etching said at least one dielectric layer ( 112 ) to expose said interconnect metal feature ( 107 ) on said substrate ( 100 );

(c) sputter depositing a seed layer ( 114 / 113 ), wherein said seed layer ( 114 / 113 ) comprises a first barrier layer ( 114 ) and a low resistivity power metal layer ( 113 );

(d) defining a photoresist pattern for at least one power metal interconnect ( 115 ), and selectively removing photoresist from said at least one power metal interconnect locations ( 114 / 113 ) such that at least a portion of said low resistivity power metal layer ( 113 ) is exposed;

(e) electroplating a low resistivity power metal layer ( 115 ) using said seed layer ( 114 / 113 ) as an electrode;

(f) removing said photoresist, and wet-etching said seed layer ( 114 / 113 ) using said electroplated metal ( 115 ) as a mask, and forming said power metal interconnect ( 115 );

(g) depositing at least one layer of at least one flowable dielectric ( 116 );

(h) photolithographically defining a pattern for at least one pad-via layout ( 135 ) in said flowable dielectric layer ( 116 );

(i) opening said at least one pad-via ( 135 ) to expose a portion of said power metal ( 115 );

(j) sputter cleaning and sequentially sputter depositing a second barrier layer ( 117 ) and a wire bondable metal ( 118 ) over said at least one pad-via ( 135 ); and

(k) photolithographically defining a pattern for a pad layout and etch removing said wire bondable metal ( 118 ) and said second barrier layer ( 117 ).

2. The process of claim 1 , wherein said dielectric layer is selected from a group consisting of silicon nitride, and composite of silicon oxide and silicon nitride.

3. The process of claim 1 , wherein said dielectric layer is etched using a first etching process and a second etching process, wherein said first etching process is an isotropic etching process and said second process is an anisotropic etching process.

4. The process of claim 3 , wherein said first etching process uses gas selected from a group consisting of Helium and Nitrogen Trifluoride.

5. The process of claim 3 , wherein said second etching process uses gas selected from a group consisting of CF4, CHF3 and Argon.

6. The process of claim 1 , wherein said first barrier metal and said second barrier metal are selected from a group consisting of Ti, TiN, TiW, Cr, Ta, TaN and combinations thereof.

7. The process of claim 1 , wherein said low resistivity power metal is selected from a group consisting of Gold and Copper.

8. The process of claim 1 , wherein the thickness of said electroplated low resistivity power metal is between about 5 um to about 50 um, and preferably between about 5 um to about 20 um.

9. The process of claim 1 , wherein said flowable dielectric is selected from a group consisting of polyimide, BCB, organo-silicate glass and combinations thereof.

10. The process of claim 9 , wherein said polyimide or flowable dielectric is photosensitive.

11. The process of claim 1 , wherein at least a portion of the surface of said flowable dielectric and said power metal interconnect is planarized.

12. The process of claim 1 , wherein said wire bondable metal is selected from a group consisting of Aluminum, Aluminum-copper, Aluminum-silicon, Aluminum-copper-silicon, Nickel, Nickel-Phosphorus, Nickel-Vanadium, Gold, and combinations thereof.

13. The process of claim 1 , wherein said second barrier metal is processed, using a process selected from a group consisting of wet etching, Reactively Ion Etching, and combinations thereof.

14. The process of claim 1 , wherein said wire bondable metal is processed using a process selected from a group consisting of wet etching, Reactively Ion Etching, and combinations thereof.

15. A process for providing a power metal interconnection ( 115 ) with a metal cap ( 125 / 127 ) on a substrate ( 100 ) having at least one exposed interconnect metal feature ( 107 ), said process comprising the steps of:

(a) depositing at least one dielectric layer ( 112 ) over at least one interconnect metal feature ( 107 ) on said substrate ( 100 );

(b) photolithographically defining a pattern for a power metal interconnect ( 115 ) and etching said dielectric layer ( 112 ) to expose a portion of said interconnect metal feature ( 107 );

(c) sputter depositing a seed layer ( 114 / 113 ), wherein said seed layer ( 114 / 113 ) comprises a first barrier layer ( 114 ) and a copper power metal layer ( 113 );

(d) defining a negative photoresist pattern for said power metal interconnect ( 115 ) over said substrate ( 100 );

(e) electroplating a copper power metal layer ( 115 ) using said seed layer ( 114 / 113 ) as an electrode;

(f) removing said photoresist and wet etching said seed layer ( 114 / 113 ) using said electroplated copper ( 115 ) as mask, and forming a copper power metal interconnect ( 115 );

(g) depositing at least one layer of a flowable dielectric ( 116 ) over said substrate ( 100 );

(h) photolithographically defining a pattern for a pad-via layout ( 135 ) in said flowable dielectric layer ( 116 );

(i) opening a pad-via ( 135 ) to expose at least a portion of said copper power metal interconnect ( 115 );

(j) electroless Nickel-Phosphorus plating ( 125 ) said exposed copper surface ( 115 ) and forming a Nickel-Phosphorus wire bond pad ( 125 ) on top of said copper power metal interconnect ( 115 ); and

(k) plating said Nickel-Phosphorus wire bond pad ( 125 ) with a layer of gold ( 127 ).

16. The process of claim 15 , wherein the thickness of said Nickel-Phosphorus metal pad is at least about 1 um.

17. The process of claim 15 , wherein a layer of gold is formed over said Nickel-Phosphorus metal pad by an immersion gold plating process.

18. The process of claim 15 , wherein said plating process for said layer of gold is selected from a group consisting of immersion gold plating process and electroless gold plating process.

19. A process for providing a power metal interconnection ( 115 ) with protective surface coating ( 120 / 121 ) on a substrate ( 100 ) having at least one exposed interconnect metal feature ( 107 ), said process comprising the steps of:

(a) depositing a dielectric layer ( 112 ) over said interconnect metal feature ( 107 ) and said substrate ( 100 );

(b) defining a pattern for a power metal interconnect ( 115 ) and etching said dielectric layer ( 112 ) to expose said interconnect metal feature ( 107 );

(c) sputter depositing a seed layer ( 114 / 113 ) comprising of a first barrier metal layer ( 114 ) and a first copper power metal layer ( 113 );

(d) defining a negative photoresist pattern for said power metal interconnect ( 115 ) over said substrate ( 100 );

(e) electroplating a second copper power metal layer ( 115 ) using said seed layer ( 114 / 113 ) as an electrode;

(f) removing said photoresist and wet etching said seed layer ( 114 / 113 ) using said electroplated copper layer ( 115 ) as mask, and forming a copper power metal interconnect ( 115 );

(g) electroless Nickel-Phosphorus plating ( 120 ) said copper power metal interconnect ( 115 ) and encasing at least a portion of said copper power metal interconnect ( 115 ) with a coating of a Nickel-Phosphorus layer ( 120 ), and

(h) plating said coating of said Nickel-Phosphorus layer ( 120 ) with a layer of gold ( 121 ).

20. The process of claim 19 , wherein the thickness of said Nickel-Phosphorus coating over said copper power metal interconnect is at least about 1 um.

21. The process of claim 19 , wherein a layer of gold is formed over said Nickel-Phosphorus coating by an immersion gold plating process.

22. The process of claim 19 , wherein said plating process for said layer of gold is selected from a group consisting of immersion gold plating process and electroless gold plating process.

23. A process of providing power metal interconnections ( 115 ) on a substrate ( 100 ) having at least one exposed interconnect metal feature ( 107 ), said process comprising the steps of:

(a) depositing a dielectric layer ( 112 ) over said interconnect metal feature ( 107 ) and said substrate ( 100 );

(b) photolithographically defining a pattern for a power metal interconnect ( 115 ) and etching said dielectric layer ( 112 ) to expose said interconnect metal feature ( 107 );

(c) sputter depositing a seed layer ( 114 / 113 ), wherein said seed layer ( 114 / 113 ) comprises of a barrier layer ( 114 ) and a gold layer ( 113 );

(d) defining a negative photoresist pattern for said power metal interconnect ( 115 );

(e) electroplating a gold power metal ( 115 ) using said seed layer ( 114 / 113 ) as an electrode; and

(f) removing said photoresist and wet etching said seed layer ( 114 / 113 ) using said electroplated gold ( 115 ) as mask forming a gold power metal interconnect ( 115 ), and wherein said gold power metal interconnect ( 115 ) comprises said sputter deposited gold layer ( 113 ) and said electroplated gold power metal layer ( 115 ).

Assignments (8)