Method for connecting magnetic substance target to backing plate, and magnetic substance target
View Patent ↗A method for connecting a magnetic substance target to a backing plate with less variation in plate thickness, characterized in having the steps of connecting the magnetic substance target to an aluminum plate beforehand while maintaining the flatness, connecting the magnetic substance target connected to the aluminum plate to the backing plate while maintaining the flatness, and grinding out the aluminum plate, whereby the flatness of the magnetic substance target can be maintained until the magnetic substance target is connected to the backing plate by a relatively simple operation.
1. An assembly, comprising:
a magnetic substance target, a backing plate, and an aluminum reinforcing plate,
said magnetic substance target having an as-wrought structure with remnant stress sufficient to provide magnetic anisotropy necessary for enabling magnetron sputtering,
wherein said magnetic substance target has a surface face, an opposite face bonded to said backing plate, and a thickness defined by a distance between said surface face and said opposite face, the thickness being 5 mm or less on average along said surface face and having a variation of 4% or less of said average thickness,
wherein the surface face is bonded to the aluminum reinforcing plate such that the aluminum reinforcing plate is integral to the magnetic substance target, and
wherein the opposite face is bonded to the backing plate after bonding the surface face to the reinforcing plate.
2. An assembly according to claim 1 , wherein the magnetic substance target is made of a magnetic substance selected from the group consisting of iron, cobalt, nickel, platinum and alloys thereof.
3. The assembly according to claim 2 , wherein the surface face is bonded to the aluminum reinforcing plate with an adhesive or brazing material.