Coaxial transmission line microstructures and methods of formation thereof
View Patent ↗Provided are coaxial transmission line microstructures formed by a sequential build process, and methods of forming such microstructures. The microstructures include a transition structure for transitioning between the coaxial transmission line and an electrical connector. The microstructures have particular applicability to devices for transmitting electromagnetic energy and other electronic signals.
1. A coaxial transmission line microstructure formed by a sequential build process, comprising:
a center conductor;
an outer conductor disposed around the center conductor;
a non-solid volume between the center conductor and the outer conductor; and
a transition structure for transitioning between the coaxial transmission line and an electrical connector
wherein the transition structure comprises an end portion of the center conductor, wherein the end portion has an increased dimension along an axis thereof; and an enlarged region of the outer conductor adapted to attach to the electrical connector, wherein the end portion of the center conductor is disposed in the enlarged region of the outer conductor, the electrical connector being connected to the center conductor and the outer conductor and being attached to a rigid member.
2. The coaxial transmission line microstructure of claim 1 , wherein at least a portion of the coaxial transmission line has a rectangular coaxial structure.
3. The coaxial transmission line microstructure of claim 1 , further comprising a substrate over which the coaxial transmission line is disposed.
4. The coaxial transmission line microstructure of claim 1 , further comprising a support member in contact with the end portion of the center conductor for supporting the end portion.
5. The coaxial transmission line microstructure of claim 4 , wherein the support member comprises a dielectric material.
6. The coaxial transmission line microstructure of claim 4 , wherein the support member comprises a pedestal disposed between the center conductor and the outer conductor.
7. A method of forming a coaxial transmission line microstructure, comprising:
disposing a plurality of layers over a substrate, wherein the layers comprise one or more of dielectric, conductive and sacrificial materials; and
forming from the layers a center conductor, an outer conductor disposed around the center conductor, a non-solid volume between the center conductor and the outer conductor and a transition structure for transitioning between the coaxial transmission line and an electrical connector
wherein the transition structure comprises an end portion of the center conductor, wherein the end portion has an increased dimension along an axis thereof; and an enlarged region of the outer conductor adapted to attach to the electrical connector, wherein the end portion of the center conductor is disposed in the enlarged region of the outer conductor, the electrical connector being connected to the center conductor and the outer conductor and being attached to a rigid member.
8. The method of claim 7 , wherein at least a portion of the coaxial transmission line has a rectangular coaxial structure.
9. The method of claim 7 , comprising a support member in contact with the end portion of the center conductor for supporting the end portion.
10. The method of claim 9 , wherein the support member comprises a dielectric material.
11. The method of claim 9 , wherein the support member comprises a pedestal disposed between the center conductor and the outer conductor.