Lead free alloy bump structure and fabrication method
View Patent ↗A method includes forming a patterned resist layer comprising a resist layer opening overlying a bond pad of a substrate. The resist layer opening is at least partially filled with a first solder component layer. A second solder component layer is formed on the first solder component layer. The patterned resist layer is removed. The first solder component layer and the second solder component layer are reflowed to form a lead free binary metal alloy solder bump electrically connected to the bond pad.
1. A method comprising:
forming a patterned resist layer on a substrate comprising a bond pad, the patterned resist layer comprising a resist layer opening overlying the bond pad;
completely filling the resist layer opening with a first solder component layer, the first solder component layer comprising a first planar surface substantially coplanar with a principal surface of the patterned resist layer;
forming a second solder component layer on the first planar surface of the first solder component layer that is substantially coplanar with the principal surface of the patterned resist layer and on the entire principal surface of the patterned resist layer;
removing the patterned resist layer and any portion of the second solder component layer on the principal surface of the patterned resist layer; and
reflowing the first solder component layer and the second solder component layer to form a binary metal alloy solder bump electrically connected to the bond pad.
2. The method of claim 1 wherein the first solder component layer is formed by plating.
3. The method of claim 2 wherein the first solder component layer is formed by electroplating.
4. The method of claim 1 wherein the second solder component layer is formed using a deposition selected from the group consisting of evaporation, sputtering, electroplating, or electroless.
5. The method of claim 1 wherein the first solder component layer comprises tin.
6. The method of claim 5 wherein the second solder component layer comprises silver.
7. The method of claim 6 wherein the binary metal alloy solder bump comprises a binary tin-silver alloy solder.
8. The method of claim 5 wherein the second solder component layer comprises copper, and wherein the binary metal alloy solder bump comprises a binary tin-copper alloy solder.
9. The method of claim 1 further comprising
forming a primary barrier layer on the substrate;
forming a conductor layer on the primary barrier layer;
forming a secondary barrier layer in the resist layer opening and on the conductor layer; and
selectively removing the conductor layer using the secondary barrier layer as a mask.
10. The method of claim 9 further comprising selectively removing the primary barrier layer using the secondary barrier layer as a mask.
11. The method of claim 1 wherein the patterned resist layer has a profile selected from the group consisting of sloped, vertical and retrograde.