Method of manufacturing a semiconductor device with a peeling prevention layer
View Patent ↗A peeling prevention layer for preventing an insulation film and a protection layer from peeling is formed in corner portions of a semiconductor device. The peeling prevention layer can increase its peeling prevention effect more when formed in a vacant space of the semiconductor device other than the corner portions, for example, between ball-shaped conductive terminals. In a cross section of the semiconductor device, the peeling prevention layer is formed on the insulation film on the back surface of the semiconductor substrate, and the protection layer formed of a solder resist or the like is formed covering the insulation film and the peeling prevention layer. The peeling prevention layer has a lamination structure of a barrier seed layer and a copper layer formed thereon when formed by an electrolytic plating method.
1. A method of manufacturing a semiconductor device, comprising:
providing a semiconductor substrate comprising a first insulation film formed on a front surface of the semiconductor substrate and a pad electrode formed on the first insulation film;
forming from a back surface of the semiconductor substrate a via hole to penetrate the semiconductor substrate in a position of the semiconductor substrate corresponding to the pad electrode;
forming a second insulation film to cover a sidewall of the via hole and the back surface;
etching the second insulation film so as to expose at least part of the pad electrode;
forming a metal layer in the via hole so as to be in contact with the exposed pad electrode and on the back surface covered by the second insulation film;
patterning the metal layer to form a penetrating electrode disposed in the via hole and connected with the pad electrode and a peeling prevention layer disposed on the second insulation film so as to be electrically isolated;
forming a protection layer covering the penetrating electrode, the second insulation film and the peeling prevention layer; and
cutting the semiconductor substrate covered by the protection layer so as to produce a semiconductor device comprising the penetrating electrode and the peeling prevention layer,
wherein the peeling prevention layer is not electrically connected to any device element formed on the front or back surface of the semiconductor substrate after the cutting of the semiconductor substrate.
2. The method of claim 1 , wherein the metal layer is formed by an electrolytic plating method.
3. The method of claim 1 , wherein the peeling prevention layer is formed in a corner portion of the semiconductor substrate.
4. The method of claim 1 , further comprising forming a recess in the back surface when the via hole is formed, wherein part of the second insulation film and part of the peeling prevention layer are formed in the recess.
5. The method of claim 1 , further comprising dividing the protection layer into a plurality of regions.
6. The method of claim 1 , wherein the forming of the metal layer comprises forming a copper layer.