IP Library › Patent Application 12160149
Patent Application Utility PCT National Stage
App. No. 12/160,149 · Confirmation No. 7507

DUAL DAMASCENE MULTILAYER INTERCONNECT STRUCTURE HAVING FILM DENSITY OF THE WIRING GROOVE SIDEWALL PORTION AWAY FROM VIA HOLE CONTACT LOWER THAN THE SIDEWALL PORTION DIRECTLY ABOVE THE VIA HOLE CONTACT.

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2011-02-28 CTFR Final Rejection 9 View
2011-02-28 BIB Bibliographic Data Sheet 1 View
2011-02-28 FWCLM Index of Claims 1 View
2011-02-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
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2008-07-07 ABST Abstract 53 View
2008-07-07 SPEC Specification 27 View
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Quick Facts
App. No.
12/160,149
Filed
2008-07-07
Pub. No.
US20090014887A1
Examiner
MAI, ANH D
Art Unit
2829