Metal-gate high-k reference structure
View Patent ↗Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V. Also disclosed are method embodiments for forming the integrated circuit structure.
1. A method of forming an integrated circuit structure, said method comprising:
providing a substrate;
forming, on said substrate, a first semiconductor body for a first field effect transistor and a second semiconductor body for a second field effect transistor having a same conductivity type as said first field effect transistor, said first semiconductor body and said second semiconductor body each having a same conduction band energy and valence band energy; and
forming different gate structures on said first semiconductor body and said second semiconductor body to achieve different threshold voltages in said first field effect transistor and said second field effect transistor, said forming of said different gate structures comprising:
forming a first gate structure, having a first effective work-function that is near said conduction band energy, on a first center portion of said first semiconductor body, said forming of said first gate structure comprising forming, on said first center portion, a first high-k gate dielectric layer; and
forming a second gate structure, having a second effective work-function different from said first effective work function and near said valence band energy, on a second center portion of said second semiconductor body, said forming of said second gate structure comprising forming a second high-k gate dielectric layer comprising a different high-k dielectric material than said first high-k gate dielectric layer, said first high-k gate dielectric layer and said second high-k gate dielectric layer having different charge fixed contents,
said forming of said first gate structure further comprising forming a first gate conductor layer, having a first work function, on said first high-k dielectric layer and said forming of said second gate structure further comprising forming a second gate conductor layer, comprising a different gate conductor material than said first gate conductor layer and having a second work function different from said first work function, on said second high-k gate dielectric layer, and
said forming of said first gate conductor layer comprising forming an n-doped polysilicon layer on said first high-k gate dielectric layer and said forming of said second gate conductor layer comprising forming a p-doped polysilicon layer on said second high-k gate dielectric layer.
2. A method of forming an integrated circuit structure, said method comprising:
providing a substrate;
forming, on said substrate, a first semiconductor body for a first field effect transistor and a second semiconductor body for a second field effect transistor having a same conductivity type as said first field effect transistor, said first semiconductor body and said second semiconductor body each having a same conduction band energy and valence band energy;
forming different gate structures on said first semiconductor body and said second semiconductor body to achieve different threshold voltages in said first field effect transistor and said second field effect transistor, said forming of said different gate structures comprising:
forming a first gate structure, having a first effective work-function that is near said conduction band energy, on a first center portion of said first semiconductor body, said forming of said first gate structure comprising forming, above said first center portion, a first gate dielectric layer and further forming a first gate conductor layer, having a first work function, on said first gate dielectric layer; and
forming a second gate structure, having a second effective work-function different from said first effective work function and near said valence band energy, on a second center portion of said second semiconductor body, said forming of said second gate structure comprising forming, above said second center portion, a second gate dielectric layer and further forming a second gate conductor layer, comprising a different gate conductor material than said first gate conductor layer and having a second work function different from said first work function, on said second gate dielectric layer,
said forming of said first gate conductor layer comprising forming an n-doped polysilicon layer and said forming of said second gate conductor layer comprising forming a p-doped polysilicon layer.
3. The method of claim 2 ,
said forming of said first gate dielectric layer comprising forming, on said first center portion, a first high-k gate dielectric layer; and
said forming of said second gate dielectric layer comprising forming, on said second center portion, a second high-k gate dielectric layer comprising a different high-k dielectric material than said first high-k gate dielectric layer, said first high-k gate dielectric layer and said second high-k gate dielectric layer having different charge fixed contents.
4. The method of claim 3 , said first high-k gate dielectric layer having a more positive fixed charged content than said second high-k gate dielectric layer such that said first field effect transistor has a more negative threshold voltage than said second field effect transistor.
5. The method of claim 3 , said first semiconductor body and said second semiconductor body each comprising a same semiconductor material such that said first semiconductor body and said second semiconductor body each have a same conduction band energy and same valence band energy and said forming of said different gate structures being performed to achieve said different threshold voltages such that said different threshold voltages differ by approximately one-half the energy-gap of said semiconductor material.