LED bonding structures and methods of fabricating LED bonding structures
View Patent ↗A method is disclosed for fabricating an LED The method includes providing an LED chip having an epitaxial region comprising at least a p-type layer and an n-type layer, an ohmic contact formed on at least one of the p-type layer or the n-type layer, and a bond pad formed on the ohmic contact. The bond pad has a total volume less than about 3×10 −5 mm 3 . The LED chip is bonded to a submount via thermocompression or thermosonic bonding.
1. A method of fabricating an LED comprising:
providing an LED chip having an epitaxial region comprising at least a p-type layer and an n-type layer, an ohmic contact formed on at least one of the p-type layer or the n-type layer, and a bond pad formed on the ohmic contact, the bond pad having a total volume less than about 3×10 −5 mm 3 ;
conductively joining the LED chip to a submount.
2. A method as recited in claim 1 , wherein the step of bonding the LED chip to a submount comprises applying a force of about 30 to 70 g to the LED chip.
3. A method as recited in claim 2 , wherein the applied force is about 50 g.
4. A method as recited in claim 1 , wherein the LED chip includes a substrate, and the ohmic contact is formed on a surface of the epitaxial region opposite the substrate.
5. A method as recited in claim 1 , wherein the bond pad has a total volume less than about 2.5×10 −5 mm 3 .
6. A method as recited in claim 1 , wherein the bond pad is formed in the shape of a parallelepiped having a generally square periphery.
7. A method as recited in claim 6 , wherein the epitaxial region has a width of about 250 μm or more, and wherein the bond pad has a height of about 1.2 μm or less and a width of about 150 μm or less.
8. A method as recited in claim 1 , wherein the bond pad is formed in the shape of a cylinder having a generally circular periphery.
9. A method as recited in claim 8 , wherein the epitaxial region has a width of about 250 μm or more, and wherein the bond pad has a height of about 2 μm or less and a diameter less than one half the width of the epitaxial region.
10. A method as recited in claim 9 , wherein the bond pad has a diameter of about 120 μm or less.
11. A method as recited in claim 1 , wherein the bond pad is formed in the shape of a polyhedron having opposing parallel faces and a star-shaped or cross-shaped periphery.
12. A method as recited in claim 11 , wherein the distance from an edge of the bond pad to an edge of the epitaxial region is at least about 20 μm.