Method to prevent corrosion of bond pad structure
View Patent ↗There is provided a method of fabrication an integrated circuit comprising providing a substrate with a bond pad formed thereover, the bond pad having a top surface for the formation of bonding connections. A passivation layer is provided over the bond pad followed by an overlying masking layer. The passivation layer is subsequently etched in accordance with the masking layer to form a patterned passivation layer with an opening that exposes a portion of the top surface of the bond pad. After etching the passivation layer, the mask layer is removed by a plasma resist strip followed by a wet solvent clean that removes etch residue from the passivation layer etch. Finally, a bond pad protective layer is grown over the surface of the bond pad. The bond pad may be composed of aluminum and the bond pad protective layer may be aluminum oxide.
1. A method of fabrication an integrated circuit comprising:
providing a substrate with a bond pad formed thereover, the bondpad having a top surface for the formation of bonding connections;
providing a passivation layer over the bondpad;
forming a masking layer over the passivation layer, the masking layer comprising photoresist;
etching the passivation layer in accordance with the masking layer to form a patterned passivation layer with an opening that exposes a portion of the top surface of the bond pad;
removing the masking layer to expose the passivation layer by a plasma strip process, wherein the plasma strip process comprises a fluorine-based chemistry for removing etching residues arising from the step of etching the passivation layer;
cleaning the substrate after removing the masking layer by a wet solvent clean process to remove etching residues and residual fluorine; and
forming a bond pad protective layer on the exposed top surface portion of the bond pad after the wet solvent clean process.
2. The method according to claim 1 , wherein the bond pad protective layer comprises an aluminum oxide.
3. The method according to claim 1 , wherein the masking layer comprises photoresist.
4. The method according to claim 1 , wherein the plasma strip process comprises an oxygen containing gas chemistry.
5. The method according to claim 1 , wherein the wet solvent clean process removes polymer residues.
6. The method according to claim 1 , wherein at least one of the chemical solvents EKC-265, Aleg310 or NE-111 is used in the wet solvent clean process.
7. The method according to claim 1 , wherein the bond pad comprises an aluminum copper based alloy.
8. The method according to claim 1 , wherein the bond pad protective layer is composed of aluminum oxide.
9. The method in claim 1 wherein the bond pad protective layer is formed by an oxidation process.
10. The method in claim 9 wherein the oxidation is a plasma oxidation process (POP) performed at a temperature of at least about 200° C.
11. A method of fabrication an integrated circuit comprising:
providing a substrate with a bond pad formed thereover;
providing a passivation layer over the bondpad;
forming a masking layer over the passivation layer, the masking layer comprising photoresist;
etching the passivation layer with a masking layer to form an opening that exposes a portion of the top surface of the bond pad;
removing the masking layer to expose the passivation layer by a plasma strip process, wherein the plasma strip process comprises a fluorine-based chemistry for removing etching residues from etching the passivation layer; and
cleaning the substrate after removing the masking layer with a wet solvent clean process to remove etching residues and residual fluorine.
12. The method of claim 11 comprises forming a bond pad protective layer on the exposed top surface portion of the bond pad after the wet clean process.
13. The method of claim 12 wherein forming the bond pad protective layer comprises a plasma oxidation process (POP).
14. The method of claim 13 wherein the plasma oxidation process (POP) is performed at a temperature of at least about 200° C.
15. The method of claim 12 wherein the bond pad protective layer comprises aluminum oxide.
16. The method of claim 12 wherein forming the bond pad protective layer comprises an oxidation process.
17. The method of claim 12 wherein the bond pad protective layer comprises oxide.
18. The method of claim 11 wherein the masking layer comprises photoreist.
19. The method of claim 11 , wherein the wet clean solvent process comprises at least one of the chemical solvents EKC-265, Aleg310 or NE-111.
20. The method of claim 11 wherein the set clean solvent process removes polymer residue.
21. A method of fabrication an integrated circuit comprising:
providing a substrate with a bond pad formed thereover, the bondpad having a top surface for the formation of bonding connections;
providing a passivation layer over the bondpad;
forming a masking layer over the passivation layer, the masking layer comprising photoresist;
etching the passivation layer in accordance with the masking layer to form a patterned passivation layer with an opening that exposes a portion of the top surface of the bond pad; and
removing the masking layer to expose the passivation layer by a plasma strip process, wherein the plasma strip process comprises a fluorine-based chemistry for removing etching residues arising from the step of etching the passivation layer.