Sucking and holding device
A sucking and holding device includes: a vacuum chuck for vacuum-sucking a substrate; and a suction assisting device for sandwiching the object between it and the vacuum chuck. The suction assisting device includes a substrate-facing surface. The substrate-facing surface seals a through hole provided in the substrate. With this configuration, the sucking and holding device can vacuum-suck and hold the substrate having a through hole. This leads to an accomplishment of a device which can hold various objects without positional displacement.
1. A sucking and holding device comprising:
vacuum suction and holding means for vacuum-sucking and holding an object to be sucked and held;
suction assisting means for sandwiching the object between it and the vacuum suction and holding means,
the object having a through hole,
the suction assisting means sealing the through hole,
the vacuum suction and holding means vacuuming the suction assisting means via the through hole;
a sensor for detecting a position of the object to be sucked and held; and
positional adjusting means for moving the vacuum suction and holding means, the positional adjusting means adjusting a horizontal position of the vacuum suction and holding means so that the object is adjusted to a predetermined horizontal position based on a horizontal position of the object detected by the sensor.
2. The sucking and holding device as set forth in claim 1 , the positional adjusting means adjusts the horizontal in a state in which the object to be sucked is sandwiched between the vacuum suction and holding means and the suction assisting means.