Liquid solvent abutment unit
In order to provide a liquid solvent abutment unit for accelerating the reaction of a liquid solvent against an adhesive member existing between a perforated support plate and a wafer, a liquid solvent abutment unit includes a supply part for supplying a support plate surface with a liquid solvent, a retention part for retaining the supplied liquid solvent in the hole-formed region on the support plate surface; a recovery part for recovering the liquid solvent retained in the hole-formed region, and a vibration unit for vibrating the liquid solvent.
1. A liquid solvent abutment unit, comprising:
an enclosure member having a flat plate and an enclosure wall extending downward and connected to a circumferential part of the flat plate, the enclosure wall having a groove formed on a lower end surface of the enclosure wall, and an O-ring being fitted in the groove, the enclosure wall, the flat plate, and the O-ring defining a retention-use space, when the O-ring is pressed onto a support plate;
a supply part configured to supply a surface of the support plate with a liquid solvent, such that the supplied liquid solvent is retained in the retention-use space, the supply part being disposed inside the enclosure wall and being a first through hole formed in a thickness direction of the flat plate;
a retention part configured to retain the supplied liquid solvent supplied to the support plate surface, the retention part being disposed inside the enclosure wall and being a second through hole formed in the thickness direction of the flat plate;
a temperature adjustment unit configured to measure and adjust a temperature of the supplied liquid solvent supplied to the support plate surface;
a vibration unit configured to vibrate the supplied liquid solvent retained in the retention-use space; and
a control unit configured to control the vibration of the vibration unit in accordance with the temperature of the supplied liquid solvent,
wherein the control unit ceases vibration of the vibration unit when the temperature of the supplied liquid solvent measured by the temperature adjustment unit exceeds a predetermined temperature, and the control unit initiates vibration of the vibration unit when the temperature of the supplied liquid solvent measured by the temperature adjustment unit is at or below the predetermined temperature.
2. The liquid solvent abutment unit according to claim 1 , wherein
the liquid solvent abutment unit further comprises a detection unit configured to detect that the retention-use space is filled with the liquid solvent.
3. The liquid solvent abutment unit according to claim 1 , wherein the O-ring is configured and arranged so as to prevent the liquid solvent from leaking.
4. The liquid solvent abutment unit according to claim 1 , further comprising a plate substantially covering the retention part, and a recovery part, the recovery part being a plurality of through holes disposed in the plate.
5. The liquid solvent abutment unit according to claim 1 , further comprising a plate substantially covering the retention part, wherein the first through hole is disposed in the center of the plate.
6. The liquid solvent abutment unit according to claim 5 , wherein the vibration unit is disposed on the plate adjacent the supply part.