Formation of alloy liner by reaction of diffusion barrier and seed layer for interconnect application
View Patent ↗An interconnect structure including an alloy liner positioned directly between a diffusion barrier and a Cu alloy seed layer as well as methods for forming such an interconnect structure are provided. The alloy liner of the present invention is formed by thermally reacting a previously deposited diffusion barrier metal alloy layer with an overlying Cu alloy seed layer. During the thermal reaction, the metal alloys from both the diffusion barrier and the Cu alloys seed layer react forming a metal alloy reaction product between the diffusion barrier and the Cu seed layer.
1. A method of forming an interconnect structure comprising:
forming at least one opening in a dielectric material;
forming a diffusion barrier on at least exposed wall portions of said dielectric material within said at least one opening, said diffusion barrier including at least an alloy metal A;
forming a Cu alloy seed layer including an alloy metal B on said diffusion barrier;
forming an alloy liner comprising alloy metal A and alloy metal B by annealing, said annealing causing diffusion of alloy metal A from the diffusion barrier and diffusion of alloy metal B from the Cu alloy seed layer and formation of said alloy liner directly between an underlying alloy metal A deficient diffusion barrier and an overlying alloy metal B deficient Cu alloy seed layer; and
removing a portion of each of said alloy liner comprising alloy metal A and alloy metal B, said alloy metal A deficient diffusion barrier, and said metal B deficient Cu alloy seed layer from a bottom of the opening, wherein said removing comprises a directional etching process.
2. The method of claim 1 further comprising forming an interconnect conductive material within said at least one opening after forming said alloy liner.
3. The method of claim 2 further comprising a planarization process.
4. The method of claim 1 further comprising forming an interconnect conductive material within said at least one opening between the forming of the Cu alloy seed layer and the forming of the alloy liner.
5. The method of claim 4 further comprising a planarization process.
6. The method of claim 1 wherein said annealing is performed at a temperature from 100° C. to 500° C.
7. The method of claim 1 wherein said annealing is performed in an inert ambient.
8. The method of claim 1 wherein said forming said at least one opening comprises lithography and etching one of a line opening, a via opening and a line opening or a combination of said openings.
9. The method of claim 1 wherein alloy metal A is a transition metal selected from Group IVB, VB, VIB, VIIB or VIII of the Periodic Table of Elements, and alloy metal B is a transition metal from Group IVB, VB, VIB, VIIB or VIII of the Periodic Table of Elements or a metal from Group IIIA of the Periodic Table of Elements, with the proviso that alloy metal B is different from alloy metal A.
10. The method of claim 1 wherein said diffusion barrier further includes nitrogen.
11. The method of claim 1 wherein said diffusion barrier is a compound of the formula M 1 A(N) wherein M 1 is a metal selected from the group consisting of Ta, Ti, Ru, W, Co, Ir, Rh and Pt.
12. The method of claim 11 wherein A comprises a same metal as M 1 .
13. The method of claim 11 wherein A comprises a different metal as M 1 .
14. The method of claim 1 wherein alloy metal B is selected from the group consisting of Al, Ir, Pt, Co, Ru, Rh and Mn.
15. The method of claim 1 wherein said annealing further causes thermal mixing of diffused alloy metal A with diffusion alloy metal B forming said alloy liner comprising alloy metal A and alloy metal B.
16. The method of claim 1 wherein said alloy metal A deficient diffusion barrier is devoid of alloy metal A.
17. The method of claim 1 wherein said alloy metal B deficient Cu alloy seed layer is devoid of alloy metal B.
18. The method of claim 1 wherein said alloy metal A deficient diffusion barrier is devoid of alloy metal A and said alloy metal B deficient Cu alloy seed layer is devoid of alloy metal B.
19. A method of forming an interconnect structure comprising:
forming at least one opening in a dielectric material;
forming a diffusion barrier on at least exposed wall portions of said dielectric material within said at least one opening, said diffusion barrier including at least an alloy metal A;
depositing a Cu alloy seed layer including an alloy metal B on said diffusion barrier;
diffusing alloy metal A from said diffusion barrier and alloy metal B from said Cu alloy seed layer and thermal mixing said diffused alloy metal A and alloy metal B forming an alloy liner comprising alloy metal A and alloy metal B, said alloy liner is located between an underlying alloy metal A deficient diffusion barrier and an overlying alloy metal B deficient Cu alloy seed layer; and
removing a portion of each of said alloy liner comprising alloy metal A and alloy metal B, said diffusion barrier, and said Cu alloy seed layer from a bottom of the opening, wherein said removing comprises a directional etching process.