Array of alpha particle sensors
View Patent ↗An array of radiation sensors or detectors is integrated within a three-dimensional semiconductor IC. The sensor array is located relatively close to the device layer of a circuit (e.g., a microprocessor) to be protected from the adverse effects of the ionizing radiation particles. As such, the location where the radiation particles intersect the device layer can be calculated with coarse precision (e.g., to within 10 s of microns).
1. A silicon-on-insulator semiconductor device, comprising:
a first layer that includes a plurality of radiation sensor cells arranged within the first layer, wherein each of the radiation sensor cells is operable to sense ionizing radiation that hits the cell, wherein each of the radiation sensor cells comprises a first transistor that pre-charges a node within the cell to a first voltage value other than ground, a second transistor that discharges the node to a ground voltage value when the cell senses ionizing radiation that hits the cell, and a third transistor that allows for selected access to a logic state of the node from outside of the cell, wherein the logic state of the node corresponds to the voltage value on the node;
a second layer that comprises a circuit layer; and
a third layer that includes a plurality of the radiation sensor cells arranged within the third layer, wherein each of the radiation sensor cells is operable to sense ionizing radiation that hits the cell, wherein each of the radiation sensor cells comprises a first transistor that pre-charges a node within the cell to a first voltage value other than ground, a second transistor that discharges the node to a ground voltage value when the cell senses ionizing radiation that hits the cell, and a third transistor that allows for selected access to a logic state of the node from outside of the cell, wherein the logic state of the node corresponds to the voltage value on the node;
wherein the first layer is disposed on top of the second layer and the third layer is disposed below the second layer.
2. The semiconductor device of claim 1 , wherein the first layer is disposed in a range of about 10 to about 15 microns from the second layer.
3. The semiconductor device of claim 2 , wherein the third layer is disposed in a range of about 10 to about 15 microns from the second layer.
4. The semiconductor device of claim 3 , wherein the first layer comprises a silicon-on-insulator layer.
5. The semiconductor device of claim 4 , wherein the third layer comprises a silicon-on-insulator layer.