Method for manufacturing a semiconductor component
View Patent ↗A semiconductor component and methods for manufacturing the semiconductor component that includes a double exposure of a layer of photoresist or the use of multiple layers of photoresist. A metallization structure is formed on a layer of electrically conductive material that is disposed on a substrate and a layer of photoresist is formed on the metallization structure. The layer of photoresist is exposed to light and developed to remove a portion of the photoresist layer, thereby forming an opening. Then, a larger portion of the photoresist layer is exposed to light and an electrically conductive interconnect is formed in the opening. The larger portion of the photoresist layer that was exposed to light is developed to expose edges of the electrically conductive interconnect and portions of the metallization structure. A protection layer is formed on the top and edges of the electrically conductive interconnect and on the exposed portions of the metallization structure.
1. A method for manufacturing a semiconductor component, comprising:
providing a material having a major surface;
forming a first electrically conductive structure over the major surface;
forming a layer of photoresist over the first electrically conductive structure;
exposing a first portion of the layer of photoresist to radiation, the first portion having a first dimension; and
exposing a second portion of the layer of photoresist to radiation, the second portion having a second dimension that is larger than the first dimension.
2. The method of claim 1 , wherein the photoresist is a positive photoresist.
3. The method of claim 1 , wherein exposing the second portion of the layer of photoresist includes exposing the second portion to radiation before hard baking the layer of photoresist.
4. The method of claim 1 , further including before exposing the second portion of the layer of photoresist to radiation, removing the first portion of the layer of photoresist to uncover a first portion of the first electrically conductive structure.
5. The method of claim 4 , further including forming a second electrically conductive structure over the first portion of the first electrically conductive structure, the second electrically conductive structure having first and second edges.
6. The method of claim 5 , further including after exposing the second portion of the layer of photoresist to radiation, uncovering at least the first edge of the second electrically conductive structure.
7. The method of claim 6 , further including forming a structure at least on the first edge of the second electrically conductive structure that was uncovered.
8. The method of claim 6 , further including after exposing the second portion of the layer of photoresist to radiation, uncovering at least the second edge of the second electrically conductive structure.
9. The method of claim 8 , further including forming a protective structure on the first and second edges of the second electrically conductive structure.
10. The method of claim 9 , wherein the protective structure is one of an electrically conductive material or an electrically non-conductive material.