Semiconductor device having a copper plug
View Patent ↗Disclosed is a semiconductor device wherein an insulation layer has a copper plug in contact with the last wiring layer of the device. There may also be a barrier layer separating the copper plug from the insulation layer. In a further embodiment, there may also be an aluminum layer between the insulation layer and copper plug. Also disclosed is a process for making the semiconductor device.
1. A semiconductor device comprising:
a semiconductor substrate having a plurality of wiring layers wherein a last wiring layer comprises a conductive material;
an insulation layer formed on the last wiring layer, the insulation layer having a via opening formed therein to expose the conductive material in the last wiring layer;
a barrier layer formed in the via opening;
a copper plug formed on the barrier layer and filling the via opening, the copper plug extending only to the top of the insulation layer; and
further comprising a dielectric layer formed on the insulation layer and having an opening aligned with and exposing the copper plug, the opening in the dielectric layer being devoid of the copper plug and an aluminum layer.
2. The semiconductor device of claim 1 wherein the barrier layer is in contact with the conductive material in the last wiring layer.
3. The semiconductor device of claim 1 wherein the barrier layer is selected from the group consisting of tantalum/tantalum nitride, titanium, titanium tungsten, titanium nitride and tungsten nitride.
4. The semiconductor device of claim 1 further comprising a ball limiting metallurgy layer formed on the dielectric layer and in the opening and in direct contact with the copper plug, the ball limiting metallurgy layer being distinct from the copper plug and further comprising a quantity of solder directly on the ball limiting metallurgy.
5. The semiconductor device of claim 1 wherein the copper plug has a wall which makes an angle with respect to the last wiring layer of 45 to 75 degrees.
6. The semiconductor device of claim 1 further comprising a cap layer between the insulation layer and the dielectric layer.
7. The semiconductor device of claim 6 wherein the cap layer is a nitride layer.
8. A semiconductor device comprising:
a semiconductor substrate having a last wiring layer that comprises a conductive material;
an insulation layer formed on the last wiring layer, the insulation layer having a via opening formed therein to expose the conductive material in the last wiring layer;
a copper plug formed in, and filling, the via opening, the copper plug extending only to the top of the insulation layer; and
further comprising a dielectric layer formed on the insulation layer and having an opening in communication with and exposing the copper plug, the opening in the dielectric layer being devoid of the copper plug and an aluminum layer.
9. The semiconductor device of claim 8 further comprising a ball limiting metallurgy layer formed on the dielectric layer and in the opening and in direct contact with the copper plug, the ball limiting metallurgy layer being distinct from the copper plug and further comprising a quantity of solder directly on the ball limiting metallurgy.
10. The semiconductor device of claim 8 wherein the copper plug has a wall which makes an angle with respect to the last wiring layer of 45 to 75 degrees.
11. The semiconductor device of claim 8 further comprising a cap layer between the insulation layer and the dielectric layer.
12. The semiconductor device of claim 11 wherein the cap layer is a nitride layer.