Integrated circuit including FinFET RF switch angled relative to planar MOSFET and related design structure
View Patent ↗An integrated circuit (IC) includes a fin field effect transistor (FinFET) radio frequency (RF) switch; and a planar complementary metal-oxide semiconductor field effect transistor (MOSFET). The planar MOSFET has a channel on a <100> wafer plane and the FinFET RF switch has a channel on a <100> fin plane. The FinFET RF switch and the planar MOSFET can be oriented at approximately 45° with respect to one another.
1. An integrated circuit (IC) comprising:
a fin field effect transistor (FinFET) radio frequency (RF) switch including:
a plurality of fins;
at least one gate coupling the plurality of fins together; and
at least one strap coupling the plurality of fins together; and
a planar complementary metal-oxide semiconductor field effect transistor (MOSFET),
wherein the planar MOSFET has a channel on a <100> wafer plane and the FinFET RF switch has a channel on a <100> fin plane.
2. The IC of claim 1 , wherein the FinFET RF switch and the planar MOSFET are oriented at approximately 45° with respect to one another.
3. The IC of claim 1 , further comprising a semiconductor-on-insulator (SOI) substrate having a <100> surface orientation upon which the FinFET RF switch and the planar MOSFET are positioned.
4. The IC of claim 3 , wherein the SOI substrate is partially depleted.
5. The IC of claim 1 , wherein the plurality of fins are oriented at approximately 45° with respect to a gate of the planar MOSFET.
6. The IC of claim 1 , wherein each fin has a height that is greater than half of a pitch between the plurality of fins.
7. An integrated circuit (IC) comprising:
a partially depleted semiconductor-on-insulator (PDSOI) substrate having a <100> surface orientation;
a fin field effect transistor (FinFET) radio frequency (RF) switch on the PDSOI substrate, the FinFET RF switch including:
a plurality of fins;
at least one gate coupling the plurality of fins together; and
at least one strap coupling the plurality of fins together; and
a planar complementary metal-oxide semiconductor field effect transistor (MOSFET) on the PDSOI substrate,
wherein the planar MOSFET has a channel on a <100> wafer plane and the FinFET RF switch has a channel on a <100> fin plane, and the FinFET RF switch and the planar MOSFET are oriented at approximately 45° with respect to one another.
8. The IC of claim 7 , wherein each fin has a height that is greater than half of a pitch between the plurality of fins.
9. A design structure embodied in a machine readable storage medium for designing, manufacturing, or testing an integrated circuit, the design structure comprising a set of instructions defining:
an integrated circuit (IC) including:
a fin field effect transistor (FinFET) radio frequency (RF) switch including:
a plurality of fins;
at least one gate coupling the plurality of fins together; and
at least one strap coupling the plurality of fins together; and
a planar complementary metal-oxide semiconductor field effect transistor (MOSFET),
wherein the planar MOSFET has a channel on a <100> wafer plane and the FinFET RF switch has a channel on a <100> fin plane.
10. The design structure of claim 9 , wherein the design structure comprises a netlist.
11. The design structure of claim 9 , wherein the design structure is stored in a data format used for the exchange of layout data of integrated circuits.
12. The design structure of claim 9 , wherein the design structure includes at least one of test data, characterization data, verification data, or design specifications.