Methods of forming a reversible resistance-switching metal-insulator-metal structure
View Patent ↗A method of forming a reversible resistance-switching metal-insulator-metal structure is provided, the method including forming a first non-metallic conducting layer, forming a non-conducting layer above the first non-metallic conducting layer, forming a second non-metallic conducting layer above the non-conducting layer, etching the first non-metallic conducting layer, non-conducting layer and second non-metallic conducting layer to form a pillar, and disposing a carbon material layer about a sidewall of the pillar. Other aspects are also provided.
1. A method comprising:
forming a reversible resistance-switching metal-insulator-metal (“MIM”) structure by:
forming a first non-metallic conducting layer;
forming a non-conducting layer above the first non-metallic conducting layer;
forming a second non-metallic conducting layer above the non-conducting layer;
etching the first non-metallic conducting layer, non-conducting layer and second non-metallic conducting layer to form a pillar; and
disposing a carbon material layer about a sidewall of the pillar, wherein the carbon material layer is conductively coupled to the first non-metallic conducting layer and the second non-metallic conducting layer,
wherein the first non-metallic conducting layer and/or the second non-metallic conducting layer comprises a heavily doped semiconductor material.
2. The method of claim 1 , wherein the semiconductor material comprises heavily doped n+ silicon.
3. The method of claim 1 , wherein the semiconductor material comprises silicon doped with one or more of phosphorous or arsenic, and having a doping concentration of between about 0.01-2.0×10 21 cm−3.
4. The method of claim 1 , wherein the semiconductor material comprises heavily doped p+ silicon.
5. The method of claim 1 , wherein the semiconductor material comprises silicon doped with one or more of boron difluoride, boron trifluoride, boron, gallium, and aluminum, and having a doping concentration of between about 0.01 -1.0 ×10 21 cm−3.
6. The method of claim 1 , wherein the non-conducting layer comprises a dielectric material.
7. The method of claim 1 , wherein the pillar has a diameter between about 200 angstroms and about 5000 angstroms.
8. The method of claim 1 , wherein the carbon material layer has a thickness between about 10 angstroms and about 100 angstroms.
9. The method of claim 1 , wherein disposing the carbon material layer comprises depositing a conformal carbon material layer over the pillar.
10. The method of claim 9 , further comprising depositing a conformal dielectric material layer over the carbon material layer.
11. The method of claim 10 , further comprising removing lateral portions of the dielectric material layer.
12. The method of claim 11 , further comprising removing lateral portions of the carbon material layer.
13. The method of claim 1 , wherein disposing the carbon material layer comprises forming the carbon material layer as a ring, or collar, around a peripheral sidewall of the pillar.
14. The method of claim 1 , wherein the carbon material layer comprises one or more of amorphous carbon containing nanocrystalline graphene, graphene, graphite, carbon nano-tube, diamond-like carbon, silicon carbide, and boron carbide.
15. A method comprising:
forming a reversible resistance-switching metal-insulator-metal (“MIM”) structure by:
forming a first non-metallic conducting layer;
forming a non-conducting layer above the first non-metallic conducting layer;
forming a second non-metallic conducting layer above the non-conducting layer;
etching the first non-metallic conducting layer, non-conducting layer and second non-metallic conducting layer to form a pillar; and
disposing a carbon material layer about a sidewall of the pillar, wherein the carbon material layer is conductively coupled to the first non-metallic conducting layer and the second non-metallic conducting layer,
wherein the first non-metallic conducting layer and/or the second non-metallic conducting layer comprises one or more of: (a) heavily doped silicon, germanium, silicon-germanium, or silicon carbide; (b) tantalum carbide, and (c) tungsten carbide.
16. A method comprising:
forming a reversible resistance-switching metal-insulator-metal (“MIM”) structure by:
forming a first non-metallic conducting layer;
forming a non-conducting layer above the first non-metallic conducting layer;
forming a second non-metallic conducting layer above the non-conducting layer;
etching the first non-metallic conducting layer, non-conducting layer and second non-metallic conducting layer to form a pillar; and
disposing a carbon material layer about a sidewall of the pillar, wherein the carbon material layer is conductively coupled to the first non-metallic conducting layer and the second non-metallic conducting layer,
wherein the non-conducting layer comprises one or more of silicon dioxide, aluminum oxide, hafnium dioxide, magnesium oxide, zirconium oxide, silicon nitride, boron nitride, and aluminum nitride.