Method and composition for chemical mechanical planarization of a metal or a metal alloy
View Patent ↗A composition and associated method for chemical mechanical planarization of a metal-containing substrate (e.g., a copper substrate) are described herein which afford high and tunable rates of metal removal as well as low dishing and erosion levels during CMP processing.
1. A method for chemical mechanical planarization of a surface having at least one feature thereon comprising a metal or a metal alloy, said method comprising the steps of:
A) placing a substrate having the surface having the at least one feature thereon comprising the metal or the metal alloy in contact with a polishing pad;
B) delivering a polishing composition to the surface comprising:
a) an abrasive;
b) a naphthalene imide derivative; and
c) an oxidizing agent;
and
C) polishing the substrate with the polishing composition.
2. The method of claim 1 wherein the naphthalene imide derivative is present in the composition in an amount that ranges from about 5 ppm to about 10,000 ppm.
3. The method of claim 1 wherein the metal is copper.
4. The method of claim 1 wherein the oxidizing agent is selected from the group consisting of hydrogen peroxide, periodic acid, potassium iodate, potassium permanganate, ammonium persulfate, ammonium molybdate, ferric nitrate, nitric acid, potassium nitrate, ammonia, amine compounds, and mixtures thereof.
5. The method of claim 4 wherein the oxidizing agent comprises hydrogen peroxide.
6. The method of claim 1 wherein the abrasive is colloidal silica.
7. The method of claim 1 wherein the polishing composition has a pH from about 4 to about 10.
8. The method of claim 1 wherein the polishing composition has a pH from about 5 to about 8.
9. A polishing composition comprising:
a) an abrasive;
b) a naphthalene imide derivative; and
c) an oxidizing agent.
10. The composition of claim 9 wherein the naphthalene imide derivative is present in the composition in an amount that ranges from about 5 ppm to about 10,000 ppm.
11. The composition of claim 9 wherein the oxidizing agent is selected from the group consisting of hydrogen peroxide, periodic acid, potassium iodate, potassium permanganate, ammonium persulfate, ammonium molybdate, ferric nitrate, nitric acid, potassium nitrate, ammonia, amine compounds, and mixtures thereof.
12. The composition of claim 11 wherein the oxidizing agent is hydrogen peroxide.
13. The composition of claim 9 wherein the abrasive is colloidal silica.
14. The composition of claim 9 wherein the polishing composition has a pH from about 4 to about 10.
15. The composition of claim 9 wherein the polishing composition has a pH from about 5 to about 8.