IP Library Granted Patent US 7,940,069
Granted Patent B2
US 7,940,069 · App. 12/653,574 · Granted May 10, 2011

System for testing semiconductors

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Quick Facts
Patent No.
US 7,940,069
App. No.
12/653,574
Granted
May 10, 2011
Kind
B2
Abstract

A testing system that includes an plural imaging devices capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer.

Claims (28)

1. A probing system for a device under test comprising:

(a) an objective lens sensing said device under test through a single optical path;

(b) a first imaging device sensing a first video sequence of said device under test at a first magnification from said single optical path;

(c) a second imaging device sensing a second video sequence of said device under test at a second magnification from said single optical path;

(d) a third imaging device sensing a third video sequence of said device under test at a third magnification from said single optical path;

(e) providing a video signal to a display that simultaneously presents said first video signal, said second video signal, and said third video signal to a monitor.

2. The probing system of claim 1 wherein said first video signal is presented in a first window, said second video signal is presented in a second window, and said third video signal is presented in a third window.

3. A probing system for a device under test comprising:

(a) an objective lens sensing said device under test through a single optical path;

(b) a first imaging device sensing a first video sequence of said device under test at a first magnification from said single optical path;

(c) a second imaging device sensing a second video sequence of said device under test at a second magnification from said single optical path;

(d) simultaneously providing said first video sequence, and said second video sequence, to a display;

(e) wherein the magnification of said first video signal is selectable and the magnification of said second video signal is selectable.

4. The probing system of claim 3 wherein said magnification of said first video signal includes a range of at least 5% of the total range of magnification that is not selectable by said user.

5. A probing system for a device under test comprising:

(a) an objective lens sensing said device under test through a single optical path;

(b) an imaging device sensing a video sequence of said device under test at a first magnification from said single optical path;

(c) a display displaying the video sequence in a first window; said display displaying a region of said first video sequence in a second window.

6. The probing system of claim 5 wherein said video displayed in said second window is from another imaging device at a second magnification from said single optical path.

7. A method for displaying video for a probing system comprising:

(a) receiving a video signal of a device under test;

(b) presenting said video signal in a first window on a display;

(c) simultaneously presenting a first portion of said video signal in a second window on a portion of said display; and

(d) simultaneously presenting a second portion of said video signal in a third window on a portion of said display;

(e) wherein a part of said video signal comprising the first portion and a part of said video signal comprising said second portion are selectable by an operator.

8. The method of claim 7 further comprising a third portion of said video signal presented in a fourth window, a fourth portion of said video signal presented in a fifth window, a fifth portion of said video signal presented in a sixth window, and a sixth portion of said video signal presented in a seventh window.

9. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 2×3 format.

10. The method of claim 8 wherein said second, third, fourth, fifth, sixth, and seventh windows are arranged in a 3×2 format.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Aug 7, 2025
From: HSBC BANK USA, NATIONAL ASSOCIATION
To: FORMFACTOR, INC.
Reel/Frame 072853/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 1, 2021
From: FORMFACTOR BEAVERTON, INC.
To: FORMFACTOR, INC.
Reel/Frame 057393/0609 →
CHANGE OF NAME Recorded Jul 18, 2018
From: CASCADE MICROTECH, INC.
To: FORMFACTOR BEAVERTON, INC.
Reel/Frame 046573/0664 →
SECURITY INTEREST IN UNITED STATES PATENTS AND TRADEMARKS Recorded Jul 12, 2016
From: FORMFACTOR, INC.; ASTRIA SEMICONDUCTOR HOLDINGS, INC.; CASCADE MICROTECH, INC.; MICRO-PROBE INCORPORATED
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 039184/0280 →