IP Library › Granted Patent US 8,294,027
Granted Patent B2
US 8,294,027 · App. 12/689,464 · Granted Oct 23, 2012

Efficiency in antireflective coating layers for solar cells

Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 8,294,027
App. No.
12/689,464
Granted
Oct 23, 2012
Kind
B2
Abstract

A method for fabricating a cell structure includes doping a substrate to form a N-region and a P-region, disposing a first anti-reflective layer on the substrate, disposing a metallic contact paste on the first anti-reflective layer, drying the metallic contact paste to form contacts, disposing a second anti-reflective layer on the first anti-reflective layer and the metallic contacts, and heating the cell structure, wherein heating the cell structure results in metallic contact material penetrating the first anti-reflective layer and contacting the substrate.

Claims (29)

1. A method for fabricating a cell structure comprising:

doping a substrate to form a N-region and a P-region;

disposing a first anti-reflective layer on the substrate;

disposing a metallic contact paste on the first anti-reflective layer;

drying the metallic contact paste to form metallic contacts;

disposing a second anti-reflective layer on the first anti-reflective layer and the metallic contacts; and

heating the cell structure, to cause material of the metallic contacts to penetrate the first anti-reflective layer and contact the substrate, and diffuse material of the metallic contacts into a region of the second anti-reflective layer.

2. The method of claim 1 , wherein the heating the cell structure further results in the first and second anti-reflective layers in forming a single resultant anti-reflective layer.

3. The method of claim 2 , wherein the single resultant anti-reflective layer has a thickness x of between 50 and 100 nanometers.

4. The method of claim 3 , wherein the first anti-reflective layer has a thickness of ½x.

5. The method of claim 3 , wherein the second anti-reflective layer has a thickness of ½x.

6. The method of claim 1 , wherein the first anti-reflective layer is made of a dielectric material.

7. The method of claim 1 , wherein the second anti-reflective layer is made of a dielectric material.

8. The method of claim 1 , wherein the metallic contact paste is a silver (Ag) paste.

9. A method for fabricating a cell structure comprising:

doping a substrate to form a N-region and a P-region;

disposing a first anti-reflective layer on the substrate;

disposing a metallic contact paste on the first anti-reflective layer;

drying the metallic contact paste to form metallic contacts;

disposing a second anti-reflective layer on the first anti-reflective layer and the metallic contacts; and

heating the cell structure, following the disposing the second anti-reflective layer, to cause material of the metallic contacts to penetrate the first anti-reflective layer and contact the substrate.

10. The method of claim 9 , wherein the heating the cell structure further results in diffusing material of the metallic contacts into a region of the second anti-reflective layer.

11. The method of claim 9 , wherein the heating the cell structure further results in the first and second anti-reflective layers in forming a single resultant anti-reflective layer.

12. The method of claim 11 , wherein the single resultant anti-reflective layer has a thickness x of between 50 and 100 nanometers.

13. The method of claim 12 , wherein the first anti-reflective layer has a thickness of ½x.

14. The method of claim 12 , wherein the second anti-reflective layer has a thickness of ½x.

15. The method of claim 9 , wherein the first anti-reflective layer is made of a dielectric material.

16. The method of claim 9 , wherein the second anti-reflective layer is made of a dielectric material.

17. The method of claim 9 , wherein the metallic contact paste is a silver (Ag) paste.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 19, 2010
From: HOVEL, HAROLD J.; KRAUSE, RAINER K.; LI, ZHENGWEN; ZHU, HUILONG
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 023808/0905 →
Continuity (1)
Related Publication 20110174369A1 · Jul 21, 2011