IP Library Granted Patent US 9,496,152
Granted Patent B2
US 9,496,152 · App. 12/722,852 · Granted Nov 15, 2016

Carrier system with multi-tier conductive posts and method of manufacture thereof

Inventors: NamJu Cho (Uiwang-si, KR); HeeJo Chi (Ichon-si, KR); HanGil Shin (Seongnam-si, KR)
Assignee: STATS ChipPAC Pte. Ltd.
H01L21/4853H01L21/561H01L21/568H01L23/49811H01L24/97H01L2224/16225H01L2224/16227H01L2224/97H01L2924/014H01L2924/01029H01L2924/14H01L2924/15311H01L2924/15787H01L2924/181Y10T29/49117
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Quick Facts
Patent No.
US 9,496,152
App. No.
12/722,852
Granted
Nov 15, 2016
Kind
B2
Abstract

A method of manufacture of a carrier system includes: providing a carrier base; forming a recess in the carrier base with the recess around a planar surface; forming a first barrier on the planar surface; forming a second barrier on the carrier base in the recess; forming a first post on the first barrier; and forming a second post on the second barrier.

Claims (51)

1. A method of manufacture of a carrier system comprising:

providing a carrier base, the carrier base formed from a metallic material;

forming a recess in the carrier base with the recess around a planar surface;

forming a first barrier on and protruding from the planar surface;

forming a second barrier on the carrier base in the recess;

forming a first post on the first barrier; and

forming a second post on the second barrier.

2. The method as claimed in claim 1 further comprising:

forming a contact pad on the planar surface; and

wherein:

forming the first post includes forming the first post adjacent to the contact pad.

3. The method as claimed in claim 1 further comprising:

forming a conductive structure on the planar surface; and

wherein:

forming the first post includes forming the first post on the conductive structure and not covering the entire surface of the conductive structure.

4. The method as claimed in claim 1 wherein forming the first post includes forming the first post perpendicular to the carrier base.

5. The method as claimed in claim 1 wherein forming the second post includes forming the second post perpendicular to the carrier base.

6. A method of manufacture of a carrier system comprising:

providing a carrier base, the carrier base formed from a metallic material;

forming a recess, having a recess bottom and a recess slope, in the carrier base with the recess around a planar surface;

forming a first barrier on and protruding from the planar surface;

forming a second barrier on the carrier base at the recess bottom;

forming a first post on the first barrier; and

forming a second post on the second barrier.

7. The method as claimed in claim 6 wherein forming the second post includes forming the second post co-planar with the first post.

8. The method as claimed in claim 6 wherein forming the recess includes forming the recess bottom parallel to the planar surface.

9. The method as claimed in claim 6 wherein forming the recess includes forming the recess having the recess slope at an obtuse angle with the recess bottom.

10. The method as claimed in claim 6 wherein forming the first barrier includes forming an etch protection layer.

11. A carrier system comprising:

a carrier base having a recess around a planar surface, the carrier base formed from a metallic material;

a first barrier on and protruding from the planar surface;

a second barrier on the carrier base in the recess;

a first post on the first barrier; and

a second post on the second barrier.

12. The system as claimed in claim 11 further comprising:

a contact pad on the planar surface; and

wherein:

the first post is adjacent to the contact pad.

13. The system as claimed in claim 11 further comprising:

a conductive structure on the planar surface; and

wherein:

the first post is on the conductive structure and not covering the entire surface of the conductive structure.

14. The system as claimed in claim 11 wherein the first post is perpendicular to the carrier base.

15. The system as claimed in claim 11 wherein the second post is perpendicular to the carrier base.

16. The system as claimed in claim 11 wherein:

the carrier having the recess includes a recess bottom and a recess slope; and

the second barrier is on the carrier base at the recess bottom.

17. The system as claimed in claim 16 wherein the second post is co-planar with the first post.

18. The system as claimed in claim 16 wherein the carrier base having the recess bottom parallel with the planar surface.

19. The system as claimed in claim 16 wherein the carrier base having the recess slope at an obtuse angle with the recess bottom.

20. The system as claimed in claim 16 wherein the first barrier is an etch protection layer.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2025
From: STATS CHIPPAC PTE. LTD.
To: STATS CHIPPAC MANAGEMENT PTE. LTD.
Reel/Frame 072788/0917 →
RELEASE OF SECURITY INTEREST Recorded Jun 17, 2020
From: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
To: STATS CHIPPAC, INC.; STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD.
Reel/Frame 053476/0094 →
CHANGE OF NAME Recorded Jul 27, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 039492/0890 →
SECURITY INTEREST Recorded Aug 6, 2015
From: STATS CHIPPAC, INC.; STATS CHIPPAC LTD.
To: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
Reel/Frame 036288/0748 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 14, 2010
From: CHO, NAMJU; CHI, HEEJO; SHIN, HANGIL
To: STATS CHIPPAC LTD.
Reel/Frame 024234/0049 →
Continuity (1)
Related Publication 20110220395A1 · Sep 15, 2011