Methods for increased array feature density
View Patent ↗The embodiments generally relate to methods of making semiconductor devices, and more particularly, to methods for making semiconductor pillar structures and increasing array feature pattern density using selective or directional gap fill. The technique has application to a variety of materials and can be applied to making monolithic two or three-dimensional memory arrays.
1. A method of making a semiconductor device, comprising:
patterning a first feature array on a substrate, wherein the first feature array comprises a plurality of completely distinct features;
depositing a first layer on the first feature array;
removing a portion of the first layer to form sidewall spacers and spacer regions;
filling the spacer regions with a selective material to form filler features; and
removing the sidewall spacers to form a second feature array having features and filler features.
2. A method as recited in claim 1 , wherein the features and filler features of the second feature array define the second feature array as having at least twice the density of first feature array.
3. A method as recited in claim 1 , wherein the first feature array comprises at least one pillar structure.
4. A method as recited in claim 1 , wherein the second feature array comprises a two-dimensional structure.
5. A method as recited in claim 1 , wherein the second feature array comprises a three-dimensional structure.
6. A method as recited in claim 1 , wherein the substrate comprises a material selected from the group consisting of metal, a dielectric material, and silicon.
7. A method as recited in claim 1 , wherein the second feature array is patterned using a surface activation technique.
8. A method as recited in claim 1 , wherein the second feature array is patterned using plasma enhanced chemical vapor deposition (PECVD).
9. A method as recited in claim 1 , wherein the selective material is applied using a directional gap fill technique.
10. A method as recited in claim 1 , wherein the second feature array comprises a carbon material.
11. A method as recited in claim 1 , wherein the first layer comprises a nitride material.
12. A method as recited in claim 1 , wherein the first removing step is accomplished by etching.
13. A method as recited in claim 1 , wherein an optional carrier gas can be applied to the spacer and spacer regions prior to applying the selective material.
14. A method as recited in claim 13 , wherein the optional carrier gas is selected from the group consisting of He, Ar, H 2 , Kr, Xe, and N 2 .
15. A method as recited in claim 1 , wherein an optional etchant gas can be applied to the spacer and spacer regions prior to applying the selective material.
16. A method as recited in claim 15 , wherein the optional etchant gas comprises a gas selected from the group consisting of H 2 , F, Cl, and Br.
17. A method as recited in claim 1 , wherein the selective material comprises a carbon material of the form C x H y , wherein x is an odd or even number greater than 1, and y is 2x.
18. A method as recited in claim 1 , wherein the selective material comprises a material selected from the group consisting of carbon, tungsten, and silicon, and their associated isotopes.
19. A method for increasing array density of features having sidewall spacers and spacer regions, comprising:
filling the spacer regions of the feature array with a selective material to form filler features, wherein the feature array comprises a plurality of completely distinct features; and
removing the sidewall spacers of the feature array to form filler features in the spacer regions and increase the density of the feature array.
20. A method for increasing pattern array density of pillars having sidewall spacers and spacer regions, comprising:
filling the spacer regions of the array pattern with a selective material, wherein the array pattern comprises a plurality of completely distinct pillars; and
removing the sidewall spacers of the array pattern pillars to form additional pillars in the spacer regions and increase the density of the pattern array.
21. A semiconductor device produced by a method for increasing pattern array density of pillars having sidewall spacers and spacer regions, comprising:
filling the spacer regions of the array pattern with a selective material, wherein the array pattern comprises a plurality of completely distinct pillars; and
removing the sidewall spacers of the array pattern pillars to form additional pillars in the spacer regions and increase the density of the pattern array of the semiconductor device.