High-purity Ni-V alloy, target therefrom, high-purity Ni-V alloy thin film and process for producing high-purity Ni-V alloy
View Patent ↗A high purity Ni—V alloy, high purity Ni—V alloy target and high purity Ni—V alloy thin film wherein the purity of the Ni—V alloy excluding Ni, V and gas components is 99.9 wt % or higher, and the V content variation among ingots, targets or thin films is within 0.4%. With these high purity Ni—V alloy, high purity Ni—V alloy target and high purity Ni—V alloy thin film having a purity of 99.9 wt % or higher, the variation among ingots, targets or thin films is small, the etching property is improved, and isotopic elements such as U and Th that emit alpha particles having an adverse effect on microcircuits in a semiconductor device are reduced rigorously. Further provided is a method of manufacturing such high purity Ni—V alloys capable of effectively reducing the foregoing impurities.
1. A method of manufacturing a high purity Ni—V alloy, comprising the steps of:
subjecting at least one of a Ni raw material and a V raw material that has a purity of 99.9 wt % or lower to electron beam melting, and
further subjecting the Ni raw material and V raw material to high frequency melting to produce the high purity Ni—V alloy.
2. A method according to claim 1 , wherein a purity of the Ni—V alloy excluding Ni, V, and gas components provided by said subjecting and further subjecting steps is 99.9 wt % or higher.
3. A method according to claim 2 , wherein the Ni—V alloy provided by said subjecting and further subjecting steps has an impurity content of each of Cr, Al and Mg of 10 ppm or less, respectively.
4. A method according to claim 3 , wherein the Ni—V alloy provided by said subjecting and further subjecting steps has an impurity content of N of 1 to 100 wtppm.
5. A method according to claim 3 , wherein the Ni—V alloy provided by said subjecting and further subjecting steps has an impurity content of each of U and Th of less than 1 ppb, respectively, and an impurity content of each of Pb and Bi of less than 0.1 ppm, respectively.
6. A method according to claim 5 , wherein the Ni—V alloy provided by said subjecting and further subjecting steps has an impurity content of N of 1 to 100 wtppm.