Metal structure of flexible multi-layer substrate and manufacturing method thereof
Disclosed is a metal structure of a multi-layer substrate, comprising a first metal layer and a dielectric layer. The first metal layer has an embedded base and a main body positioned on the embedded base. The base area of the embedded base is larger than the base area of the main body. After the dielectric layer covers the main body and the embedded base, the dielectric layer is opened at the specific position of the first metal layer for connecting the first metal layer with a second metal layer above the dielectric layer. When the metal structure is employed as a pad or a metal line of the flexible multi-layer substrate according to the present invention, the metal structure cannot easily be delaminated or separated from the contacted dielectric layer. Therefore, a higher reliability for the flexible multi-layer substrate can be achieved.
1. A metal structure of a multi-layer substrate, comprising:
a first metal part, having an embedded base and a main body positioned on the embedded base, wherein a base area of the embedded base is larger than a base area of the main body; and
a dielectric layer, covering the embedded base and the main body and having a hole at a specific position of the first metal part to connect with a second metal part above the dielectric layer, wherein the main body and the embedded base are monolithic formed.
2. The metal structure of claim 1 , wherein the main body and the embedded base of the first metal part are formed at the same process.
3. The metal structure of claim 1 , wherein the main body and the embedded base are formed by the same metal material.
4. The metal structure of claim 1 , wherein the multi-layer substrate is flexible.
5. The metal structure of claim 1 , wherein a material of the first metal part is copper.
6. The metal structure of claim 1 , wherein a material of the second metal part is solder.
7. The metal structure of claim 1 , wherein a material of the dielectric layer is polyimide.
8. The metal structure of claim 1 , wherein the first metal part is employed as a pad of the flexible multi-layer substrate.
9. The metal structure of claim 8 , wherein the second metal part is a solderball mount for package.
10. The metal structure of claim 1 , wherein the first metal part is employed as a metal line in the flexible multi-layer substrate.
11. The metal structure of claim 10 , wherein the dielectric layer is polyimide.