Hybrid silicon wafer and method of producing the same
View Patent ↗Provided is a hybrid silicon wafer in which molten state polycrystalline silicon and solid state single-crystal silicon are mutually integrated, comprising fine crystals having an average crystal grain size of 8 mm or less at a polycrystalline portion within 10 mm from a boundary with a single-crystal portion. Additionally provided is a method of manufacturing a hybrid silicon wafer, wherein a columnar single-crystal silicon ingot is sent in a mold in advance, molten silicon is cast around and integrated with the single-crystal ingot to prepare an ingot complex of single-crystal silicon and polycrystalline silicon, and a wafer shape is cut out therefrom. The provided hybrid silicon wafer comprises the functions of both a polycrystalline silicon wafer and a single-crystal wafer.
1. A hybrid silicon wafer obtained by integrating a single crystalline silicon and molten state silicon placed around the single crystalline silicon and solidifying the molten state silicon to form a body of polycrystalline silicon around the single-crystalline silicon, comprising:
a structure in which a plate-shaped single-crystal silicon portion has an outer peripheral edge and in which a polycrystalline silicon portion having a cast structure extends coplanar with the single-crystal silicon portion and laterally from the outer peripheral edge of the single-crystal silicon portion such that the polycrystalline silicon portion forms an outer peripheral edge of the hybrid silicon wafer; and
fine crystals having an average crystal grain size of 8 mm or less at the polycrystalline silicon portion within 10 mm from a boundary with the single-crystal silicon portion.
2. The hybrid silicon wafer according to claim 1 , wherein the relative intensity based on X-ray diffraction of a (400) orientation of the polycrystalline silicon portion within 10 mm from the boundary with the single-crystal silicon portion is 5 or more when the intensity of a (511) orientation is 100.
3. The hybrid silicon wafer according to claim 2 , wherein a the plate-shaped single-crystal silicon portion is located at a center of the hybrid silicon wafer or is decentered relative to the center of the hybrid silicon wafer.
4. The hybrid silicon wafer according to claim 3 , wherein the wafer is disk-shaped, and the overall diameter of the wafer is 400 mm or more.
5. The hybrid silicon wafer according to claim 2 , wherein a relative intensity based on X-ray diffraction of a (400) orientation of the polycrystalline silicon portion distanced 50 mm or more from the boundary with the single-crystal silicon portion when the intensity of a (511) orientation is 100 is less than the relative intensity based on X-ray diffraction of a (400) orientation of the polycrystalline silicon portion within 10 mm from the boundary with the single-crystal silicon portion when the intensity of a (511) orientation is 100.
6. The hybrid silicon wafer according to claim 2 , wherein a relative intensity based on X-ray diffraction of a (400) orientation of the polycrystalline silicon portion distanced 50 mm or more from the boundary with the single-crystal silicon portion is 1 to 2 when the intensity of a (511) orientation is 100.
7. The hybrid silicon wafer according to claim 1 , wherein the plate-shaped single-crystal silicon portion is located at a center of the hybrid silicon wafer or is decentered relative to the center of the hybrid silicon wafer.
8. The hybrid silicon wafer according to claim 1 , wherein the wafer is disk-shaped, and the overall diameter of the wafer is 400 mm or more.
9. The hybrid silicon wafer according to claim 1 , wherein a relative intensity based on X-ray diffraction of a (400) orientation of the polycrystalline silicon portion distanced 50 mm or more from the boundary with the single-crystal silicon portion is 1 to 2 when the intensity of a (511) orientation is 100.
10. A method of manufacturing the hybrid silicon wafer of claim 1 , wherein a columnar single-crystal silicon ingot is set in a mold in advance, molten silicon is cast around and integrated with the single-crystal ingot to prepare an ingot complex of single-crystal silicon and polycrystalline silicon, and a wafer shape is cut out therefrom to form a structure in which a plate-shaped single-crystal silicon portion has an outer peripheral edge and in which a polycrystalline silicon portion extends coplanar with the single-crystal silicon portion and laterally from the outer peripheral edge of the single-crystal silicon portion such that the polycrystalline silicon portion forms an outer peripheral edge of the hybrid silicon wafer, the structure having fine crystals with an average crystal grain size of 8 mm or less at the polycrystalline silicon portion within 10 mm from a boundary with the single-crystal silicon portion.
11. The method of manufacturing a hybrid silicon wafer according to claim 10 , wherein the mold is preheated to 800 to 1300° C.
12. The method of manufacturing a hybrid silicon wafer according to claim 10 , wherein a crucible for melting polycrystalline silicon is a crucible comprised primarily of SiO2, a carbon sleeve is disposed around the crucible, temperature of carbon is raised based on high frequency induction heating, and silicon is heated and melted indirectly based on the heat transfer thereof.