Semiconductor device and method of forming base leads from base substrate as standoff for stacking semiconductor die
View Patent ↗A semiconductor device has a base substrate with first and second opposing surfaces. A first etch-resistant conductive layer is formed over the first surface of the base substrate. A second etch-resistant conductive layer is formed over the second surface of the base substrate. A first semiconductor die has bumps formed over contact pads on an active surface of the first die. The first die is mounted over a first surface of the first conductive layer. An encapsulant is deposited over the first die and base substrate. A portion of the base substrate is removed to form electrically isolated base leads between opposing portions of the first and second conductive layers. A second semiconductor die is mounted over the encapsulant and a second surface of the first conductive layer between the base leads. A height of the base leads is greater than a thickness of the second die.
1. A method of making a semiconductor device, comprising:
providing a base substrate including first and second opposing surfaces;
forming a first etch-resistant conductive layer over the first surface of the base substrate;
forming a second etch-resistant conductive layer over the second surface of the base substrate;
providing a first semiconductor die including a plurality of bumps formed over contact pads on an active surface of the first semiconductor die;
disposing the first semiconductor die on the base substrate with the bumps bonded to a first surface of the first etch-resistant conductive layer;
depositing an encapsulant over the first semiconductor die and base substrate;
removing a portion of the base substrate to form electrically isolated base leads between opposing portions of the first etch-resistant conductive layer and second etch-resistant conductive layer; and
disposing a second semiconductor die on the encapsulant and a second surface of the first etch-resistant conductive layer between the base leads.
2. The method of claim 1 , wherein a height of the base leads is greater than a thickness of the second semiconductor die.
3. The method of claim 1 , further including disposing a third semiconductor die over the first semiconductor die.
4. The method of claim 1 , wherein the first etch-resistant conductive layer includes a first contact pad, redistribution layer, and second contact pad.
5. The method of claim 1 , further including depositing the encapsulant using a mold underfill process.
6. A method of making a semiconductor device, comprising:
providing a base substrate including first and second opposing surfaces;
forming a first conductive layer over the first surface of the base substrate;
forming a second conductive layer over the second surface of the base substrate;
disposing a first semiconductor die on the first conductive layer over the base substrate;
depositing an encapsulant over the first semiconductor die and base substrate;
removing a portion of the base substrate to form electrically isolated base leads between opposing portions of the first conductive layer and second conductive layer; and
disposing a second semiconductor die on the encapsulant and first conductive layer between the base leads.
7. The method of claim 6 , wherein the first conductive layer includes an etch-resistant material.
8. The method of claim 6 , wherein the second conductive layer includes an etch-resistant material.
9. The method of claim 6 , wherein a height of the base leads is greater than a thickness of the second semiconductor die.
10. The method of claim 6 , wherein the first semiconductor die and second semiconductor die are electrically connected to opposite sides of a portion of the first conductive layer.
11. The method of claim 6 , further including disposing a third semiconductor die over the first semiconductor die.
12. The method of claim 6 , further including:
forming a plurality of conductive vias through the first semiconductor die; and
disposing a third semiconductor die over the first semiconductor die electrically connected to the conductive vias.
13. The method of claim 6 , further including depositing the encapsulant using a mold underfill process.
14. A method of making a semiconductor device, comprising:
providing a base substrate including first and second opposing surfaces;
forming a first conductive layer over the first surface of the base substrate;
forming a second conductive layer over the second surface of the base substrate;
disposing a first semiconductor die on the first conductive layer over the base substrate;
depositing an encapsulant over the first semiconductor die and base substrate;
removing a portion of the base substrate to form electrically isolated base leads between the first conductive layer and second conductive layer; and
disposing a second semiconductor die on the encapsulant and first conductive layer between the base leads.
15. The method of claim 14 , wherein the first semiconductor die and second semiconductor die are electrically connected to opposite sides of a portion of the first conductive layer.
16. The method of claim 14 , wherein a height of the base leads is greater than a thickness of the second semiconductor die.