Localized implant into active region for enhanced stress
View Patent ↗Methods for enhancing strain in an integrated circuit are provided. Embodiments of the invention include using a localized implant into an active region prior to a gate etch. In another embodiment, source/drain regions adjacent to the gates are recessed to allow the strain to expand to full potential. New source/drain regions are allowed to grow back to maximize stress in the active region.
1. A method comprising:
providing a semiconductor substrate having a gate region and a non-active region defined therein;
depositing a first gate layer on the semiconductor substrate, the first gate layer substantially covering the gate region and the non-active region;
implanting a stress-inducing material into only the gate region and portions of the first gate layer on the gate region following the depositing the first gate layer,
wherein the implanting forms a stress including gate layer substantially on the gate region;
depositing a second gate layer on the semiconductor substrate after the implanting the stress-inducing material;
annealing the semiconductor substrate after the depositing of the second gate layer,
wherein the annealing creates a stress in the gate region; and
forming a gate structure including a gate electrode, the gate structure formed directly above the gate region and including the first gate layer and the second gate layer,
wherein the forming the gate structure includes etching the first gate layer and the second gate layer after the implanting the stress-inducing material.
2. The method of claim 1 , further comprising forming the first gate layer and the second gate layer into the gate structure after the second gate layer depositing,
wherein the gate structure is formed adjacent a source/drain region on the semiconductor substrate and the second gate layer has a thickness of about 5 nanometers to about 75 nanometers.
3. The method of claim 2 , further comprising:
depositing a cap layer on the second gate layer in the gate region;
recessing the source/drain region in the semiconductor substrate adjacent to the gate region, allowing stress in the gate region to increase;
forming a set of spacers around the gate region; and
re-growing the source/drain region adjacent to the gate structure.
4. The method of claim 1 , wherein the gate region is disposed adjacent a source/drain and the first gate layer has a thickness of about 5 nanometers to about 50 nanometers.
5. The method of claim 1 , wherein the annealing of the semiconductor substrate includes annealing the second gate layer after the depositing.
6. The method of claim 4 , further comprising:
recessing the source/drain region in the semiconductor substrate adjacent to the gate region, allowing stress in the gate region to increase; and
re-growing the source/drain region adjacent to the gate structure.
7. The method of claim 1 , wherein the implanting includes a dose in the range of approximately 2×10 20 atoms/cm 3 to approximately 3×10 21 atoms/cm 3 and is performed in less than the entire gate region.
8. The method of claim 1 , wherein the stress-inducing material is only implanted into active portions of the gate region and portions of the first gate layer above the active portions of the gate region.