Gate structure for field effect transistor
View Patent ↗A field effect transistor having a gate structure that comprises an interfacial layer positioned in between the transistor channel region and a high-K dielectric layer of the gate stack. The interfacial layer comprises Al x Si y O z , which has a higher relative dielectric constant value than SiO 2 . A method of forming the gate structure of a field effect transistor. The method includes forming a gate stack comprising, in order: a SiO 2 -based layer adjacent a channel region of the field effect transistor; a high-K dielectric layer on the SiO 2 -based layer; and a gate electrode on the high-K dielectric layer. The method also includes introducing Al into the SiO 2 -based layer to form an Al x Si y O z interfacial layer in between the high-K dielectric layer and the channel region. A heating step to allows Al introduced into channel region to diffuse out of the channel region into the interfacial layer.
1. A method of forming a gate structure of a field effect transistor, the method comprising:
forming a gate stack comprising, in order:
a SiO 2 -based layer adjacent a channel region of the field effect transistor;
a high-K dielectric layer on the SiO 2 -based layer; and
a gate electrode on the high-K dielectric layer;
performing an Al introduction step, whereby Al is introduced into the SiO 2 -based layer to form an Al x Si y O z interfacial layer in between the high-K dielectric layer and the channel region;
performing a heating step to allow Al introduced into the channel region during said Al introduction step to diffuse out of the channel region into the interfacial layer; and
compensating for a p-type tuning effect on the work function of the gate electrode due to the Al introduction step by adding n-type dopants to the gate electrode.
2. The method of claim 1 , wherein said Al introduction step comprises ion implantation.
3. The method of claim 2 , wherein the ion implantation is performed with an implantation energy in the range 2-8 keV.
4. The method of claim 3 , wherein the ion implantation is performed with a dosage level in the range 1×10 15 cm −2 to 6×10 15 cm −2 .
5. The method of claim 1 , wherein said Al introduction step comprises plasma doping (PLAD).
6. The method of claim 1 , comprising forming said gate structure on a MISFET, a FinFET, or a TrenchFET.
7. The method of claim 1 , wherein the heating step is performed at a temperature in the range 600° C. to 1100° C. for a duration between 1 s to less than a minute.
8. The method of claim 1 , wherein the heating step is performed at a temperature above 1000° C. and up to 1100° C.
9. A method of forming a gate structure of a field effect transistor, the method comprising:
forming a gate stack comprising, in order:
a SiO 2 -based layer adjacent a channel region of the field effect transistor;
a high-K dielectric layer on the SiO 2 -based layer; and
a gate electrode on the high-K dielectric layer;
performing an Al introduction step, whereby Al is introduced into the SiO 2 -based layer to form an AlSi y O z interfacial layer in between the high-K dielectric layer and the channel region;
performing a heating step to allow Al introduced into the channel region during said Al introduction step to diffuse out of the channel region into the interfacial layer; and
adding n-type dopants to the gate electrode;
wherein the step of adding n-type dopants further includes compensating for a p-type tuning effect on the work function of the gate electrode due to the Al introduction step.