Method to control metal semiconductor micro-structure
View Patent ↗A method of forming a metal semiconductor alloy that includes forming an intermixed metal semiconductor region to a first depth of a semiconductor substrate without thermal diffusion. The intermixed metal semiconductor region is annealed to form a textured metal semiconductor alloy. A second metal layer is formed on the textured metal semiconductor alloy. The second metal layer on the textured metal semiconductor alloy is then annealed to form a metal semiconductor alloy contact, in which metal elements from the second metal layer are diffused through the textured metal semiconductor alloy to provide a templated metal semiconductor alloy. The templated metal semiconductor alloy includes a grain size that is greater than 2× for the metal semiconductor alloy, which has a thickness ranging from 15 nm to 50 nm.
1. A metal semiconductor alloy contact on a semiconductor layer, the metal semiconductor alloy contact comprising:
a textured metal semiconductor alloy layer having a thickness of less than 25 Å extending to a first depth of the semiconductor layer; and
a templated metal semiconductor alloy layer in direct contact with the textured metal semiconductor alloy layer and extending to a second depth of the semiconductor layer greater than the first depth, the templated metal semiconductor alloy layer having the same crystalline orientation as the textured metal semiconductor alloy, and comprising metal semiconductor crystal grains having an in-plane texture to semiconductor crystal grains of the semiconductor at an interface between the semiconductor layer and the templated metal semiconductor alloy, wherein the templated metal semiconductor alloy has a grain size that is greater than 2× a thickness of the metal semiconductor alloy contact.
2. The metal semiconductor alloy contact of claim 1 , wherein for the metal semiconductor alloy contact has a thickness ranging from 15 nm to 50 nm.
3. The metal semiconductor alloy contact of claim 1 , wherein the textured metal semiconductor alloy comprises nickel silicide, cobalt silicide or a combination thereof.
4. The metal semiconductor alloy contact of claim 3 , wherein the templated metal semiconductor alloy comprises a nickel silicide alloyed with platinum, titanium or erbium.
5. The metal semiconductor alloy contact of claim 4 , wherein the metal semiconductor alloy contact does not agglomerate up to temperatures of 750° C.
6. The metal semiconductor alloy contact of claim 1 , wherein the textured metal semiconductor alloy has a crystal structure that is single crystal and the templated metal semiconductor alloy has a crystalline structure that is single crystal.