Semiconductor film comprising an oxide containing in atoms, Sn atoms and Zn atoms
A field effect transistor including: a substrate, and at least gate electrode, a gate insulating film, a semiconductor layer, a protective layer for the semiconductor layer, a source electrode and a drain electrode provided on the substrate, wherein the source electrode and the drain electrode are connected with the semiconductor layer therebetween, the gate insulating film is between the gate electrode and the semiconductor layer, the protective layer is on at least one surface of the semiconductor layer, the semiconductor layer includes an oxide containing In atoms, Sn atoms and Zn atoms, the atomic composition ratio of Zn/(In+Sn+Zn) is 25 atom % or more and 75 atom % or less, and the atomic composition ratio of Sn/(In+Sn+Zn) is less than 50 atom %.
1. An amorphous semiconductor film comprising an oxide containing In atoms, Sn atoms and Zn atoms forming said semiconductor film, which film is amorphous,
the atomic composition ratio of Zn/(In+Sn+Zn) being 57 atom % or more and 66 atom % or less,
the atomic composition ratio of Sn/(In+Sn+Zn) being 10 atom % or more and 18 atom % or less,
the atomic ratio of Sn/Zn being 0.15 or more and 0.27 or less, and an electron carrier concentration of the amorphous semiconductor film is 10 13 to 10 18 /cm 3 , and
wherein the amorphous semiconductor film has an etching speed in PAN of less than 10 nm/min at 40° C. wherein the PAN comprises 87 wt % phosphoric acid, 3 wt % nitric acid and 10 wt % acetic acid.
2. The amorphous semiconductor film according to claim 1 , wherein an average valence number, as measured using X-ray photoelectron spectroscopy (XPS), of Sn is from +3.6 to +4.0.
3. The amorphous semiconductor film according to claim 1 , wherein an average valence number, as measured using X-ray photoelectron spectroscopy (XPS), of Sn is from +3.8 to +4.0.
4. The amorphous semiconductor film according to claim 1 , wherein an average valence number, as measured using X-ray photoelectron spectroscopy (XPS), of Sn is from +3.2 to +4.0.
5. The amorphous semiconductor film according to claim 1 , wherein the atomic ratio of Sn/In is 0.41 or more and 0.69 or less.