Implant damage control by in-situ C doping during sige epitaxy for device applications
Some example embodiments of the invention comprise methods for and semiconductor structures comprised of: a MOS transistor comprised of source/drain regions, a gate dielectric, a gate electrode, channel region; a carbon doped SiGe region that applies a stress on the channel region whereby the carbon doped SiGe region retains stress/strain on the channel region after subsequent heat processing.
1. A method for forming a device comprising:
providing a substrate having a device region;
forming a p-type transistor on the device region of the substrate, wherein the transistor comprises
a gate,
source and drain (S/D) regions adjacent to the gate, wherein a bottom of the S/D regions is disposed below a bottom of source-drain extension (SDE) regions, and
a channel region under the gate between the S/D regions;
forming at least one recess in the substrate; and
forming a stressor region in at least a portion of the recess in the substrate to apply a stress on the channel region, the stressor region comprises a carbon doped silicon germanium (SiGe) stressor layer having EOR defects resulting from ion implantation to form the S/D regions, wherein a bottom of the stressor layer is disposed at least below the EOR defects, and wherein the carbon doped SiGe stressor layer comprises an amount of carbon to reduce the amount of EOR defects in order to reduce relaxation of the stress in the stressor layer from subsequent annealing of the substrate.
2. The method of claim 1 wherein forming the at least one recess in the substrate includes:
forming S/D recesses adjacent to the gate.
3. The method of claim 2 wherein forming the stressor region comprises forming S/D stressors in at least a portion of the S/D recesses adjacent to the gate.
4. The method of claim 3 further comprises forming S/D layers above top surfaces of the S/D stressors in the S/D recesses.
5. The method of claim 2 wherein the S/D recesses are formed after forming the gate of the p-type transistor.
6. The method of claim 2 comprises forming S/D stressors in the S/D recesses adjacent to the gate.
7. The method of claim 6 wherein the stress comprises a compressive stress.
8. The method of claim 1 wherein the stressor region comprises a stressor layer which completely fills the recess in the substrate.
9. The method of claim 8 wherein:
the stressor region is disposed under and spaced apart from the channel region; and
further comprises forming a channel layer over the stressor region.
10. The method of claim 9 further comprises:
forming S/D recesses adjacent to the gate structure.
11. The method of claim 1 wherein the amount of carbon in the carbon doped SiGe layer comprises about 0.1 to 0.2 atomic %.
12. The method of claim 1 wherein the bottom of the stressor layer is disposed completely below the EOR defects.
13. The method of claim 1 wherein the carbon doped stressor layer is formed by selective epitaxial process.
14. A method for forming a device comprising:
providing a substrate having a device region;
forming a p-type transistor on the device region of the substrate, wherein the transistor comprises
a gate,
source and drain (S/D) regions adjacent to the gate, wherein a bottom of the S/D regions is disposed below a bottom of source-drain extension (SDE) regions, and
a channel region under the gate between the S/D regions;
forming at least one recess in the substrate; and
forming a stressor region in at least a portion of the recess in the substrate to apply a stress on the channel region, the stressor region comprises a carbon doped silicon germanium (SiGe) stressor layer having EOR defects resulting from ion implantation to form the S/D regions, and wherein a bottom of the stressor layer is disposed at least below the EOR defects.
15. The method of claim 14 wherein forming the at least one recess in the substrate includes:
forming S/D recesses adjacent to the gate.
16. The method of claim 15 wherein the stressor region comprises forming S/D stressors in at least a portion of the S/D recesses adjacent to the gate.
17. A method for forming a device comprising:
providing a substrate having a device region;
forming a transistor on the device region, wherein the transistor comprises
a gate,
diffusion regions adjacent to the gate, wherein a bottom of the diffusion regions is below a bottom of extension regions,
forming at least one recess in at least a portion of the substrate; and
forming a stressor region in at least a portion of the recess to apply a stress on a desired region of the substrate, the stressor region comprises a carbon doped silicon germanium (SiGe) stressor layer having EOR defects resulting from subsequent ion implantation to form the diffusion regions and wherein the carbon doped SiGe stressor layer comprises an amount of carbon to reduce the amount of EOR defects in order to reduce relaxation of the stress in the stressor layer from subsequent processing of the substrate and a bottom of the stressor layer is disposed at least below the EOR defects.
18. The method of claim 17 wherein the transistor further comprises:
a channel region under the gate between the diffusion regions.
19. The method of claim 18 wherein the desired region includes the channel region.
20. The method of claim 18 wherein forming the at least one recess includes etching at least a portion of the substrate.
21. The method of claim 17 wherein the transistor comprises a p-type transistor.
22. The method of claim 17 wherein the amount of carbon in the stressor layer comprises about 0.1 to 0.2 atomic %.
23. The method of claim 17 further comprises forming at least one diffusion layer above a top surface of the stressor layer, and wherein the transistor comprises a n-type transistor.