IP Library Granted Patent US 8,648,601
Granted Patent B2
US 8,648,601 · App. 13/130,315 · Granted Feb 11, 2014

Method for control of stabilizer additives in electroless metal and metal alloy plating electrolytes

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Quick Facts
Patent No.
US 8,648,601
App. No.
13/130,315
Granted
Feb 11, 2014
Kind
B2
Abstract

The present invention describes a method for the measurement of the stabilizer additive concentration in electroless metal and metal alloy plating electrolytes comprising a voltammetric measurement. Said method comprises the steps a. conditioning of the working electrode, b. interaction of intermediates on the working electrode, c. measurement of the Faradaic current and d. determining the Faradaic current.

Claims (17)

1. A voltammetric method for the measurement of the stabilizer additive concentration in electroless metal or metal alloy plating electrolytes, comprising the following steps:

a. conditioning of the working electrode surface

b. thereafter bringing into contact such working electrode surface with the electroless metal or metal alloy plating electrolyte and applying a fixed potential in a three-electrode set-up to said working electrode surface for a time required to reach a steady state of the interaction of intermediate species with the working electrode surface

c. measuring the Faradaic current by applying a potential scan starting from the fixed potential applied during step b

d. determining of at least one Faradaic current value at at least one potential value of a potential scan,

wherein stabilizer additives are added to the electroless metal or metal plating electrolyte in order to obtain the target value, if a deviation of the determined Faradaic current from the target Faradaic current is observed.

2. The method according to claim 1 , wherein the determined Faradaic current is compared with the target Faradaic current.

3. The method of claim 1 , wherein the working electrode surface is conditioned by an electrochemical reduction in the electroless metal or metal alloy plating electrolyte.

4. The method according to claim 1 , wherein the working electrode is chemically etched prior to the electrochemical reduction.

5. The method according to claim 1 , wherein the determined Faradaic current is a stationary Faradaic current.

6. The method according to claim 1 , wherein the determined Faradaic current is a non-stationary Faradaic current.

7. The method according to claim 1 wherein the Faradaic current measured in step c is an oxidation current.

8. The method according to claim 1 wherein the Faradaic current measured in step c is a reduction current.

9. The method according to claim 1 wherein a first Faradaic current is measured in step c is a reduction current and a second Faradaic current measured in step c is an oxidation current.

10. The method according to claim 1 , wherein the electroless metal or metal alloy plating electrolyte is a chemical plating electrolyte applying a reducing agent.

11. The method according to claim 1 , wherein the electroless metal or metal alloy plating electrolyte is an immersion plating electrolyte.

12. The method according to claim 1 , wherein the electroless metal or metal alloy plating electrolyte is selected from the group comprising copper, nickel, gold, palladium, ruthenium, tin, silver and alloys thereof.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Aug 18, 2022
From: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
To: ATOTECH DEUTSCHLAND GMBH & CO. KG (F/K/A ATOTECH DEUTSCHLAND GMBH); ATOTECH USA, LLC
Reel/Frame 061521/0103 →
SECURITY INTEREST Recorded Mar 18, 2021
From: ATOTECH DEUTSCHLAND GMBH; ATOTECH USA, LLC
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 055650/0093 →
RELEASE OF SECURITY INTEREST Recorded Mar 18, 2021
From: BARCLAYS BANK PLC, AS COLLATERAL AGENT
To: ATOTECH DEUTSCHLAND GMBH; ATOTECH USA, LLC
Reel/Frame 055653/0714 →
SECURITY INTEREST Recorded Feb 1, 2017
From: ATOTECH DEUTSCHLAND GMBH; ATOTECH USA INC
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 041590/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 20, 2011
From: DONNER, CONSTANZE; BAUER, GUENTHER; STERN, THERESE; WURDINGER, KAY; BRANDT, LUTZ; BRUENING, FRANK
To: ATOTECH DEUTSCHLAND GMBH
Reel/Frame 026313/0245 →