Substrate structure with die embedded inside and dual build-up layers over both side surfaces and method of the same
The present invention comprises a first substrate with a die formed on a die metal pad, a first and a second wiring circuits formed on the surfaces of the first substrate. A second substrate has a die opening window for receiving the die, a third wiring circuit is formed on top surface of the second substrate and a fourth wiring circuit on bottom surface of the second substrate. An adhesive material is filled into the gap between back side of the die and top surface of the first substrate and between the side wall of the die and the side wall of the die receiving through hole and the bottom side of the second substrate. During the formation, laser is introduced to cut the backside of the first substrate and an opening hole is formed in the first substrate to expose a part of the backside of the Au or Au/Ag metal layer of chip/die.
1. A method for forming a semiconductor device package comprising:
preparing a second substrate with embedded dice inside and an Au or Au/Ag metal layer formed on a bottom surface of said dice of the second substrate;
preparing a first substrate disposed under the bottom surface of said dice of the second substrate;
using a laser to cut a backside of the first substrate to form an opening hole;
sputtering metal on an outside of said Au or Au/Ag metal layer of said die, and forming a metal layer to fill the opening hole of said first substrate; and
forming a wiring circuit on a bottom surface of said metal layer of said first substrate.
2. The method of claim 1 , wherein said Au or Au/Ag metal layer formed on the bottom surface of said die of the second substrate is formed in wafer process.
3. The method of claim 1 , wherein an exposure area of the opening hole is smaller than a size of said die.
4. The method of claim 1 , wherein said wiring circuit includes CCL Cu and E-plating Cu.
5. The method of claim 1 , further comprising to form a lens on a top of die and second substrate for light emitting package application.