Silicon solar cell
View Patent ↗A silicon solar cell includes a first silicon layer with an emitter layer which has a thickness in a range of 50 nanometers to few hundreds nanometers. The emitter layer has at least one region which is porosified by chemical or electrochemical etching, wherein at least one part of the porosified region is embodied as metal silicide layer. A second silicon layer is disposed underneath the emitter layer, with the metal silicide extending from a top side of the emitter layer in a direction to the second silicon layer. At least one metal layer is applied on the metal silicide layer.
1. A method for producing a silicon solar cell composed of a wafer with a silicon layer, said method comprising the steps of:
etching a layer selected from the group consisting of silicon layer that forms an emitter layer, and an already formed emitter layer, with the emitter layer having a thickness in a range of 50 nanometers up to few hundred nanometers, by using an etching medium to porosify the layer at least in one region;
forming a patterned masking layer on a surface of a wafer side having the emitter layer to produce a region with masking layer and a region without masking layer;
galvanically coating the porosified emitter layer in the region without masking layer with a first metal layer by contacting the porosified silicon with a metal-containing electrolyte;
heating the emitter layer and the first metal layer until a metal silicide layer forms in at least one part of the porosified region and extends from a top side of the emitter layer in a direction to an adjacent silicon layer; and
removing the masking layer,
wherein the etching medium and the metal-containing electrolyte are a same electrolyte.
2. The method of claim 1 , further comprising doping the silicon layer to form the emitter layer.
3. The method of claim 1 , wherein the silicon layer is n-doped, said coating step includes depositing metal in and on the porosified and cathodically polarized silicon.
4. The method of claim 1 , wherein the silicon layer is n-doped, said etching step including electrochemical etching with anodic polarization of the silicon layer, to form an anodically polarized region.
5. The method of claim 4 , wherein, during electrochemical etching, the anodically polarized region is provided with the etching medium in such a way that the anodically polarized region is dipped into the etching medium.
6. The method of claim 1 , wherein electrical contact-making for cathodic or anodic polarization of the silicon layer is effected outside the electrolyte.
7. The method of claim 1 , wherein the etching medium comprises hydrofluoric acid, a tension-reducing agent, and a metal salt.
8. The method of claim 7 , wherein the tension reducing agent is a surfactant, alcohol or acetic acid.
9. The method of claim 1 , wherein only one side of the solar cell to be produced is exposed to an electrolyte.
10. The method of claim 1 , wherein the heating step for forming the metal silicide layer is effected in a range of 250° C. to 700° C.
11. The method of claim 1 , wherein the heating step for forming the metal silicide layer is effected in a range of 250° C. to 400° C.
12. The method of claim 1 , wherein, after the formation of the metal silicide layer, any remaining first metal layer is removed and a first metal layer is thereupon deposited again.
13. The method of claim 1 , wherein a second metal layer is formed onto the first metal layer prior to the heating.
14. The method of claim 1 , wherein the masking layer comprises a resist that can be applied by means of screen printing.