Method and system for local control of defect density in gallium nitride based electronics
View Patent ↗A diode includes a substrate characterized by a first dislocation density and a first conductivity type, a first contact coupled to the substrate, and a masking layer having a predetermined thickness and coupled to the semiconductor substrate. The masking layer comprises a plurality of continuous sections and a plurality of openings exposing the substrate and disposed between the continuous sections. The diode also includes an epitaxial layer greater than 5 μm thick coupled to the substrate and the masking layer. The epitaxial layer comprises a first set of regions overlying the plurality of openings and characterized by a second dislocation density and a second set of regions overlying the set of continuous sections and characterized by a third dislocation density less than the first dislocation density and the second dislocation density. The diode further includes a second contact coupled to the epitaxial layer.
1. A diode comprising:
a substrate characterized by a first dislocation density and a first conductivity type;
a first contact coupled to the substrate;
a masking layer having a predetermined thickness and coupled to the semiconductor substrate, wherein the masking layer comprises a plurality of continuous sections and a plurality of openings exposing the substrate, wherein the openings are disposed between the continuous sections;
an epitaxial layer greater than 5 μm thick coupled to the substrate and the masking layer, wherein the epitaxial layer comprises:
a first set of regions overlying the plurality of openings and characterized by a second dislocation density; and
a second set of regions overlying the set of continuous sections and characterized by a third dislocation density less than the first dislocation density and the second dislocation density; and
a plurality of second contacts coupled to the epitaxial layer, wherein each of the second contacts overlies a continuous section of the masking layer, and wherein each continuous section of the masking layer is overlied by more than one second contact.
2. The diode of claim 1 wherein the substrate comprises a GaN substrate and the first dislocation density is higher than 1×10 5 cm −2 .
3. The diode of claim 1 wherein the first conductivity type comprises an n-type.
4. The diode of claim 1 wherein the epitaxial layer comprises one or more GaN-based layers.
5. The diode of claim 4 wherein the thickness of the epitaxial layer is between 10 μm and 100 μm.
6. The diode of claim 5 wherein the thickness of the epitaxial layer is between 20 μm and 50 μm.
7. The diode of claim 1 wherein the masking layer comprises a patterned oxide layer.
8. The diode of claim 1 wherein the plurality of openings are characterized by a lateral width of between 2 μm and 10 μm.
9. The diode of claim 1 wherein the second dislocation density is substantially equal to the first dislocation density.
10. The diode of claim 1 wherein the second contact overlies the second set of regions of the epitaxial layer.
11. The diode of claim 1 further comprising a coalescence boundary disposed in the second set of regions of the epitaxial layer.
12. The diode of claim 1 further comprising a second epitaxial layer of a second conductivity type opposite to the first conductivity type disposed between the epitaxial layer and the second contact.
13. The diode of claim 12 wherein the second contact comprises an ohmic contact.
14. The diode of claim 1 further wherein the second contact comprises a Schottky contact.
15. A vertical junction FET comprising:
a substrate characterized by a first dislocation density and a first conductivity type;
a first contact coupled to the substrate;
a masking layer having a predetermined thickness and coupled to the semiconductor substrate, wherein the masking layer comprises a plurality of continuous sections of the predetermined thickness and a plurality of openings exposing the substrate, wherein the openings are disposed between the continuous sections;
an epitaxial layer coupled to the substrate and the masking layer, wherein the epitaxial layer comprises:
a first set of regions overlying the plurality of openings and characterized by a second dislocation density; and
a second set of regions overlying the set of continuous sections and characterized by a third dislocation density less than the first dislocation density and the second dislocation density;
a plurality of gate regions coupled to the epitaxial layer and defining one or more current flow channels;
one or more second contacts coupled to the epitaxial layer, each of the one or more second contacts being adjacent one of the one or more current flow channels, wherein each of the second contacts overlies a corresponding one of the continuous sections of the masking layer, and wherein each continuous section of the masking layer is overlied by more than one second contact; and
a plurality of third contacts, each of the plurality of third contacts being coupled to one of the plurality of gate regions.
16. The vertical junction FET of claim 15 wherein the substrate comprises a III-nitride substrate.
17. The vertical junction FET of claim 16 wherein the III-nitride substrate comprises an n-type GaN substrate and the first dislocation density is higher than 1×10 5 cm −2 .
18. The vertical junction FET of claim 15 wherein the masking layer comprises a patterned oxide layer.
19. The vertical junction FET of claim 15 wherein the plurality of openings are characterized by a lateral width of between 2 μm and 10 μm.
20. The vertical junction FET of claim 15 wherein the second dislocation density is substantially equal to the first dislocation density.
21. The vertical junction FET of claim 15 wherein each of the one or more current flow channels are disposed between sets of the plurality of gate regions and the one or more second contacts overlie the one or more current flow channels.
22. The vertical junction FET of claim 15 wherein the first contact comprises a drain, the one or more second contacts comprise sources, and the plurality of third contacts comprise gates.
23. The vertical junction FET of claim 15 further comprising a regrowth interface between the plurality of gate regions and the epitaxial layer.