High-capacity low cost multi-state magnetic memory
View Patent ↗A multi-state current-switching magnetic memory element includes a stack of magnetic tunneling junction (MTJ) separated by a non-magnetic layer for storing more than one bit of information, wherein different levels of current applied to the memory element cause switching to different states.
1. A method of making a multi-state current-switching magnetic memory element comprising:
depositing a first pinning layer on top of a bottom electrode;
depositing a first magnetic tunneling junction (MTJ) of a stack of MTJs on top of the first pinning layer;
forming a non-magnetic layer on top of the first MTJ wherein the non-magnetic layer is formed of a material selected from a group comprising: Nickel niobium (NiNb), Nickel phosphorous (NiP), Nickel vanadium (NiV), Nickel bororn (NiB) and copper-zirconium (CuZr);
forming a second MTJ on top of the non-magnetic layer, each of the first and second MTJs of the stack having a unique resistance associated therewith, the stack capable of storing more than one bit of information, each of the first and second MTJs of the stack including a barrier layer having a thickness associated therewith, each of the at least two MTJs further including a free layer and a fixed layer, the barrier layer of the first MTJ of the stack directly contacting and formed on top of the fixed layer of the first MTJ of the stack and the free layer of the first MTJ of the stack directly contacting and formed on top of the barrier layer of the first MTJ of the stack, the non-magnetic layer directly contacting and formed on top of the free layer of the first MTJ of the stack, the free layer of the second MTJ of the stack directly contacting and formed on top of the non-magnetic layer and the barrier layer of the second MTJ of the stack formed on top of the free layer of the second MTJ of the stack and the fixed layer of the second MTJ of the stack directly contacting and formed on top of the barrier layer of the second MTJ of the stack, the barrier layer of each of the first and second MTJ of the stack having a thickness that is different from the thickness of the barrier layers of all of the other MTJs of the stack, the thickness of the barrier layer of each of the first and second MTJs of the stack being at least in part indicative of the resistance of each of the MTJs of the stack, the stack being capable of storing one bit in each of the MTJs of the stack;
depositing a second pinning layer on top of the second MTJ of the stack; and
depositing a top electrode on top of the second pinning layer.
2. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , further applying different levels of current to the multi-state current-switching magnetic memory element to cause switching to different states.
3. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein the first MTJ of the stack is larger, in size, in the same planar dimension, than the second MTJ of the stack.
4. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein forming the barrier layer of each of the first and second MTJs of the stack substantially of magnesium oxide (MgO).
5. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein forming the fixed layer of each of the first and second MTJs substantially of a magnetic material.
6. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein forming the top electrode of Tantalum (Ta).
7. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein forming each of the first and second pinning layers substantially of IrMn or PtMn or NiMn or any other material including Manganese (Mn).
8. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein forming each of the first and second fixed layers substantially of a magnetic material.
9. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein forming each of the first and second fixed layers magnetic material including CoFeB or CoFe/Ru/CoFeB.
10. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein the non-magnetic layer is made of amorphous non-magnetic alloys.
11. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein the non-magnetic layer is made of a crystalline non-magnetic alloy.
12. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein each of the barrier layers of the stack have a thickness and that the thickness of at least two of the barrier layers is different from each other.
13. A method of making a multi-state current-switching magnetic memory element, as recited in claim 1 , wherein the first and second MTJ each have an aspect ratio and the aspect ratio of the first MTJ is different than the aspect ratio of the second MTJ.