Voltage regulation for 3D packages and method of manufacturing same
View Patent ↗Structures and related processes for effectively regulating power among slave chips in a 3D memory multichip package that employs TSVs for interlevel chip connections. Individual voltage regulators are employed on one or more of the slave chips for accurate level control of internal voltages, for example, word line driver voltage (VPP), back bias voltage (VBB), data line voltage (VDL), and bit line pre-charge voltage/cell plate voltage (VBLP/VPL). Employing regulators on one or more of the slave chips not only allows for precise regulation of power levels during typical memory stack operation, but also provides tolerance in small variations in power levels caused, for example, by manufacturing process variations. Moreover, less chip real estate is used as compared to techniques that provide complete power generators on each chip of a multichip stack.
1. A multichip package, comprising:
a master chip and one or more slave chips stacked with and electrically coupled to the master chip;
an internal supply voltage generator located on the master chip and configured to generate an initial internal supply voltage to be sent to the one or more slave chips using chip interconnects; and
a voltage regulator located on each of the master chip and at least one of the one or more slave chips, each voltage regulator configured to convert the initial internal supply voltage to a final internal supply voltage for use on each of the master chip and the at least one of the one or more slave chips.
2. A multichip package according to claim 1 , wherein the voltage regulators on each of the master chip and at least one of the one or more slave chips are configured to step down the initial internal supply voltage to generate the final internal supply voltage.
3. A multichip package according to claim 2 , wherein a minimum level of the initial internal supply voltage is determined by a resistance of the chip interconnects used to send the initial internal supply voltage to the one or more slave chips, as well as a maximum current consumption of the voltage regulators.
4. A multichip package according to claim 2 , wherein the internal supply voltage generator comprises a charge pump circuit to generate the initial internal supply voltage.
5. A multichip package according to claim 2 , wherein each of the voltage regulators comprises a voltage-down converter and a voltage driver.
6. A multichip package according to claim 1 , wherein the master chip and the one or more slave chips comprise memory devices.
7. A multichip package according to claim 6 , wherein the internal supply voltage generator is configured to generate an initial word line driver voltage, and the voltage regulators on each of the master chip and at least one of the one or more slave chips are word line driver voltage regulators configured to step down the initial word line driver voltage to generate a final word line driver voltage for use on each of the master chip and the at least one of the one or more slave chips.
8. A multichip package according to claim 7 , wherein the initial word line driver voltage generator comprises a charge pump circuit to generate the initial word line driver voltage, and each of the word line driver voltage regulators comprises a voltage-down converter and a voltage driver.
9. A multichip package according to claim 6 , wherein the internal supply voltage generator is configured to generate an initial data line voltage, and the voltage regulators on each of the master chip and at least one of the one or more slave chips are data line voltage regulators configured to convert the initial data line voltage to generate a final data line voltage for use on each of the master chip and the at least one of the one or more slave chips.
10. A multichip package according to claim 9 , wherein the internal supply voltage generator comprises a division converter comprising a voltage divider and a negative feedback comparator for comparing a voltage from the voltage divider to a reference voltage.
11. A multichip package according to claim 9 , wherein the data line voltage regulators comprise a negative feedback comparator for comparing the final data line voltage to the initial data line voltage.
12. A multichip package according to claim 6 , further comprising a back bias voltage generator on the master chip, wherein the back bias voltage generator comprises a fast cycle oscillator circuit configured for active mode operation and a slow cycle oscillator circuit configured for standby mode operation.
13. A multichip package according to claim 12 , further comprising a back bias voltage regulator on each of the master chip and at least one of the one or more slave chips, each back bias voltage regulator comprising a slow cycle oscillator configured for standby mode operation.
14. A multichip package according to claim 6 , further comprising a bit line pre-charge voltage/cell plate voltage generator on each of the master chip and at least one of the one or more slave chips for generating a bit line pre-charge voltage/cell plate voltage.
15. A multichip package according to claim 6 , wherein the internal supply voltage generator is configured to generate the initial internal supply voltage from a voltage external to the memory devices on the master chip.
16. A multichip package according to claim 15 , wherein the external voltage is derived from input/output circuitry of the multichip package.
17. A multichip package according to claim 6 , wherein the memory devices are DRAM memory devices.
18. A multichip package according to claim 1 , wherein the one or more slave chips comprises a plurality of slave chips, a first of the plurality of slave chips stacked with the master chip, and others of the plurality of slave chips successively stacked with the first of the plurality of slave chips, the master chip and the plurality of slave chips electrically connected using the chip interconnects.
19. A multichip package according to claim 1 , wherein the chip interconnects comprise through-silicon vias.
20. A method for voltage regulation, the method comprising:
providing a multichip package comprising a master chip and one or more slave chips;
generating an initial internal supply voltage on the master chip;
transmitting the initial internal supply voltage to at least one of the one or more slave chips stacked with and electrically coupled to the master chip using chip interconnects; and
converting the initial internal supply voltage on each of the master chip and the at least one of the one or more slave chips to a final internal supply voltage for use on each of the master chip and the at least one of the one or more slave chips.
21. A method according to claim 20 , wherein converting the initial internal supply voltage comprises stepping down the initial internal supply voltage on each of the master chip and the at least one of the one or more slave chips to generate the final internal supply voltage.
22. A method according to claim 20 , wherein generating the initial internal supply voltage further comprises generating a minimum level of the initial internal supply voltage based on a resistance of the chip interconnects used to send the initial internal supply voltage to the one or more slave chips, as well as a maximum current consumption of the voltage regulators.
23. A method according to claim 20 , wherein providing the multichip package further comprises providing a multichip package comprising a master chip having memory devices and one or more slave chips having memory devices.
24. A method according to claim 23 , wherein generating an initial internal supply voltage comprises generating an initial word line driver voltage, and wherein converting the initial internal supply voltage comprises stepping down the initial word line driver voltage on each of the master chip and the one or more slave chips to generate a final word line driver voltage for use on each of the master chip and the at least one of the one or more slave chips.
25. A method according to claim 24 , wherein generating the initial word line driver voltage comprises generating the initial word line driver voltage using a charge pump circuit on the master chip, and wherein stepping down the initial word line driver voltage comprises stepping down the initial word line driver voltage with voltage regulators, each comprising a voltage-down converter and a voltage driver, on each of the master chip and the at least one of the one or more slave chips.
26. A method according to claim 23 , wherein generating an initial internal supply voltage comprises generating an initial data line voltage, and wherein converting the initial internal supply voltage comprises converting the initial data line voltage to generate a final data line voltage for use on each of the master chip and the at least one of the one or more slave chips.
27. A method according to claim 26 , wherein generating the initial data line voltage comprises generating the initial data line voltage using a division converter comprising a voltage divider and a negative feedback comparator for comparing a voltage from the voltage divider to a reference voltage, and wherein generating the final data line voltage comprises generating the final data line voltage using a negative feedback comparator for comparing the final data line voltage to the initial data line voltage.
28. A method according to claim 23 , further comprising generating on the master chip a back bias voltage configured for active mode operation, and a back bias voltage for standby mode operation.
29. A method according to claim 28 , further comprising generating a back bias voltage on at least one of the one or more slave chips for standby mode operation.
30. A method according to claim 23 , further comprising generating a bit line pre-charge voltage/cell plate voltage on each of the master chip and at least one of the one or more slave chips.
31. A method according to claim 23 , wherein generating the internal supply voltage comprises generating the initial internal supply voltage from a voltage external to the memory devices on the master chip.
32. A method according to claim 31 , wherein the external voltage is derived from input/output circuitry of the multichip package.
33. A method according to claim 23 , wherein providing the multichip package comprising a master chip having memory devices and one or more slave chips having memory devices further comprises providing a multichip package comprising a master chip having DRAM memory devices and one or more slave chips having DRAM memory devices.
34. A method according to claim 20 , wherein providing the multichip package comprising one or more slave chips comprises providing a multichip package comprising a plurality of slave chips, a first of the plurality of slave chips stacked with the master chip, and others of the plurality of slave chips successively stacked with the first of the plurality of slave chips, the master chip and the plurality of slave chips electrically connected using the chip interconnects.
35. A method according to claim 20 , wherein transmitting the initial internal supply voltage to at least one of the one or more slave chips using chip interconnects further comprises transmitting the initial internal supply voltage to the at least one of the one or more slave chips using through-silicon vias.
36. A multichip package, comprising:
a master chip comprising memory devices, and one or more slave chips comprising memory devices stacked with and electrically coupled to the master chip;
an initial word line driver voltage generator located on the master chip and configured to generate an initial word line driver voltage, and a word line driver voltage regulator located on each of the master chip and at least one of the one or more slave chips, each regulator configured to step down the initial word line driver voltage to generate a final word line driver voltage on each of the master chip and the at least one of the one or more slave chips; and
an initial data line voltage generator located on the master chip and configured to generate an initial data line voltage, and a data line voltage regulator located on each of the master chip and at least one of the one or more slave chips, each regulator configured to convert the initial data line voltage to a final data line voltage on each of the master chip and the at least one of the one or more slave chips.
37. A multichip package according to claim 36 , wherein the initial word line driver voltage generator comprises a charge pump circuit to generate the initial word line driver voltage, and each of the word line driver voltage regulators comprises a voltage-down converter and a voltage driver.
38. A multichip package according to claim 36 , wherein the initial data line voltage generator comprises a division converter comprising a voltage divider and a negative feedback comparator for comparing a voltage from the voltage divider to a reference voltage, and wherein the data line voltage regulators comprise a negative feedback comparator for comparing the final data line voltage to the initial data line voltage.
39. A multichip package according to claim 36 , further comprising a back bias voltage generator located on the master chip and configured to generate a back bias voltage for active mode operation.
40. A multichip package according to claim 39 , further comprising a back bias voltage regulator on each of the master chip and at least one of the one or more slave chips, each back bias voltage regulator comprising a slow cycle oscillator configured for standby mode operation.
41. A multichip package according to claim 36 , further comprising a bit line pre-charge voltage/cell plate voltage generator on each of the master chip and at least one of the one or more slave chips for generating a bit line pre-charge voltage/cell plate voltage.
42. A multichip package according to claim 41 , wherein the bit line pre-charge voltage/cell plate voltage is derived from the final data line voltage.
43. A multichip package according to claim 36 , wherein the one or more slave chips comprises a plurality of slave chips, a first of the plurality of slave chips stacked with the master chip, and others of the plurality of slave chips successively stacked over the first of the plurality of slave chips, the master chip and the plurality of slave chips electrically connected using the chip interconnects.
44. A multichip package according to claim 36 , wherein the initial word line driver voltage and the initial data line voltage are derived from a voltage external to the memory devices on the master chip.
45. A multichip package according to claim 44 , wherein the external voltage is derived from input/output circuitry of the multichip package.
46. A multichip package according to claim 36 , wherein the memory devices are DRAM memory devices.
47. A multichip package according to claim 36 , wherein the chip interconnects comprise through-silicon vias.
48. A method for voltage regulation, the method comprising:
providing a multichip package comprising a master chip having memory devices and one or more slave chips having memory devices;
generating an initial word line driver voltage on the master chip;
transmitting the initial word line driver voltage to at least one of the one or more slave chips using chip interconnects, the one or more slave chips stacked with and electrically coupled to the master chip;
stepping down the initial word line driver voltage on each of the master chip and the at least one of the one or more slave chips to generate a final word line driver voltage for use on each of the master chip and the at least one of the one or more slave chips;
generating an initial data line voltage on the master chip;
transmitting the initial data line voltage to at least one of the one or more slave chips using the chip interconnects; and
converting the initial data line voltage on each of the master chip and the at least one of the one or more slave chips to generate a final data line voltage on each of the master chip and the at least one of the one or more slave chips.
49. A method according to claim 48 , wherein generating the initial word line driver voltage comprises generating the initial word line driver voltage from a voltage external to the memory devices on the master chip.
50. A method according to claim 48 , wherein generating the initial word line driver voltage comprises generating the initial word line driver voltage using a charge pump circuit on the master chip, and wherein stepping down the initial word line driver voltage comprises stepping down the initial word line driver voltage with voltage regulators, each comprising a voltage-down converter and a voltage driver, on each of the master chip and chip one or more slave chips.
51. A method according to claim 48 , wherein generating the initial data line voltage comprises generating the initial data line voltage from a voltage external to the memory devices on the master chip.
52. A method according to claim 48 , wherein generating the initial data line voltage comprises generating the initial data line voltage using a division converter comprising a voltage divider and a negative feedback comparator for comparing a voltage from the voltage divider to a reference voltage.
53. A method according to claim 48 , further comprising generating on the master chip a back bias voltage configured for active mode operation of the multichip package and a back bias voltage for standby mode operation of the multichip package.
54. A method according to claim 48 , further comprising generating a back bias voltage on each of the one or more slave chips for standby mode operation of the multichip package.
55. A method according to claim 48 , further comprising generating a bit line pre-charge voltage/cell plate voltage on each of the master chip and at least one of the one or more slave chips.
56. A method according to claim 55 , wherein generating the bit line pre-charge voltage/cell plate voltage on each of the master chip and at least one of the one or more slave chips comprises deriving the bit line pre-charge voltage/cell plate voltage from the final data line voltage.
57. A method according to claim 48 , wherein the memory devices are DRAM memory devices.
58. A method according to claim 48 , wherein providing the multichip package comprising one or more slave chips comprises providing a multichip package comprising a plurality of slave chips, a first of the plurality of slave chip stacked with the master chip, and others of the plurality of slave chips successively stacked with the first of the plurality of slave chips, the master chip and plurality of slave chips electrically connected using the chip interconnects.
59. A method according to claim 48 , wherein transmitting the initial internal supply voltage to at least one of the one or more slave chips using chip interconnects further comprises transmitting the initial internal supply voltage to the at least one of the one or more slave chips using through-silicon vias.