E-fuses containing at least one underlying tungsten contact for programming
View Patent ↗Semiconductor structures are provided containing an electronic fuse (E-fuse) that includes a fuse element and at least one underlying tungsten contact that is used for programming the fuse element. In some embodiments, a pair of neighboring tungsten contacts is used for programming the fuse element. In another embodiment, an overlying conductive region can be used in conjunction with one of the underlying tungsten contacts to program the fuse element. In the disclosed structures, the fuse element is in direct contact with upper surfaces of a pair of underlying tungsten contacts. In one embodiment, the semiconductor structures may include an interconnect level located atop the fuse element. The interconnect level has a plurality of conductive regions embedded therein. In other embodiments, the fuse element is located within an interconnect level that is located atop the tungsten contacts.
1. A semiconductor structure comprising:
a plurality of tungsten contacts located within a dielectric material;
a fuse element located atop a portion of the dielectric material and spanning a pair of neighboring tungsten contacts of the plurality of tungsten contacts;
a dielectric capping layer located atop the fuse element, the dielectric material and any remaining tungsten contacts of the plurality of tungsten contacts; and
an interconnect level located atop the dielectric capping layer, wherein said interconnect level comprises another dielectric material having at least one conductive region located therein, wherein at least one of said tungsten contacts of said pair of neighboring tungsten contacts is used for programming said fuse element.
2. The semiconductor structure of claim 1 , wherein both said tungsten contacts of said pair of neighboring tungsten contacts are used for programming said fuse element.
3. The semiconductor structure of claim 1 , wherein said at least one conductive region is used for programming and represents an anode of an E-Fuse, and one of said tungsten contacts of said plurality of tungsten contacts represents a cathode of said E-Fuse.
4. The semiconductor structure of claim 1 , wherein said fuse element comprises Cu, Al, Si, Ge or alloys thereof.
5. The semiconductor structure of claim 1 , wherein said fuse element comprises a phase change material selected from at least one chalcogenide.
6. The semiconductor structure of claim 1 , wherein said fuse element comprises at least one metal oxide.
7. The semiconductor structure of claim 1 , further comprising a hard mask located atop an upper surface of the dielectric material, said hard mask having an upper surface that is coplanar with an upper surface of each tungsten contact of said plurality of tungsten contacts.
8. The semiconductor structure of claim 1 , wherein an upper surface of each tungsten contact of said plurality of tungsten contacts is coplanar with an upper surface of said dielectric material.
9. A semiconductor structure comprising:
a plurality of tungsten contacts located within a dielectric material; and
an interconnect level located atop the dielectric material, said interconnect level comprising another dielectric material having an opening that comprises a fuse element and an overlying conductive material located therein, wherein said opening including the fuse element and the overlying conductive material spans a pair of neighboring tungsten contacts of the plurality of tungsten contacts, and wherein said fuse element and said conductive material are comprised of a different material, and wherein at least one of said tungsten contacts of said pair of neighboring tungsten contacts is used for programming said fuse element.
10. The semiconductor structure of claim 9 , wherein both said tungsten contacts of said pair of neighboring tungsten contacts are used for programming said fuse element.
11. The semiconductor structure of claim 9 , wherein said at least one conductive region is used for programming and represents an anode of an E-Fuse, and one of said tungsten contacts of said plurality of tungsten contacts represents a cathode of said E-Fuse.
12. The semiconductor structure of claim 9 , wherein said fuse element comprises Cu, Al, Si, Ge or alloys thereof.
13. The semiconductor structure of claim 9 , wherein said fuse element comprises a phase change material selected from at least one chalcogenide.
14. The semiconductor structure of claim 9 , comprises wherein said fuse element comprises at least one metal oxide.
15. The semiconductor structure of claim 9 , further comprising a hard mask located atop an upper surface of the dielectric material, said hard mask having an upper surface that is coplanar with an upper surface of each tungsten contact of said plurality of tungsten contacts.
16. The semiconductor structure of claim 9 , wherein an upper surface of each tungsten contact of said plurality of tungsten contacts is coplanar with an upper surface of said dielectric material.