IP Library Granted Patent US 9,355,910
Granted Patent B2
US 9,355,910 · App. 13/324,740 · Granted May 31, 2016

Semiconductor device with transistor local interconnects

Inventors: Mahbub Rashed (Santa Clara, CA); Irene Y. Lin (Los Altos Hills, CA); Steven Soss (Cornwall, NY); Jeff Kim (San Jose, CA); Chinh Nguyen (Austin, TX); Marc Tarabbia (Pleasant Valley, NY); Scott Johnson (Wappingers Falls, NY); Subramani Kengeri (San Jose, CA); Suresh Venkatesan (Danbury, CT)
Assignee: GLOBALFOUNDRIES, INC.
H01L21/823418H01L21/76895H01L21/823475H01L27/0207H01L27/11807H01L2924/0002
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Quick Facts
Patent No.
US 9,355,910
App. No.
13/324,740
Granted
May 31, 2016
Kind
B2
Abstract

A semiconductor device is provided for implementing at least one logic element. The semiconductor device includes a semiconductor substrate with a first transistor and a second transistor formed on the semiconductor substrate. Each of the transistors comprises a source, a drain, and a gate. A trench silicide layer electrically connects one of the source or the drain of the first transistor to one of the source or the drain of the second transistor.

Claims (18)

1. A semiconductor device comprising:

a semiconductor substrate;

a first transistor and a second transistor disposed on said substrate;

each of said transistors comprising a source, a drain, and a gate;

a first CB layer electrically connected to said gate of said first transistor;

a second CB layer electrically connected to said gate of said second transistor; and

a CA layer extending longitudinally between a first end and a second end; wherein

said first CB layer is electrically connected to said first end of said CA layer;

said second CB layer is electrically connected to said second end of said CA layer;

said gate of said first transistor extends longitudinally along a first line and said gate of said second transistor extends longitudinally along a second line, wherein said first and second lines are generally parallel to one another and spaced apart from one another; and

said CA layer extends generally parallel to said lines and generally perpendicular to said first CB layer and said second CB layer; and

wherein said first CB layer extends longitudinally beyond said gate of said first transistor and/or said second CB layer extends longitudinally beyond said gate of said second transistor.

2. A semiconductor device as set forth in claim 1 wherein said CA layer is disposed between said gates.

3. A semiconductor device as set forth in claim 2 wherein said CA layer defines a length extending parallel to said lines greater than a length of said CB layers extending parallel to said lines.

4. A semiconductor device as set forth in claim 3 further comprising a third transistor having a gate extending longitudinally along said first line and a fourth transistor having a gate extending longitudinally along said second line.

5. A semiconductor device as set forth in claim 4 wherein said gates of said first and third transistors are separated by a gap and said gates of said second and fourth transistors are separated by gap.

6. A semiconductor device as set forth in claim 5 wherein said CA layer extends across said gap.

7. A semiconductor device as set forth in claim 1 wherein said CA layer extends less than 110 nanometers above said substrate.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 21, 2019
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 050122/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 13, 2011
From: RASHED, MAHBUB; LIN, IRENE Y.; SOSS, STEVEN; KIM, JEFF; NGUYEN, CHINH; TARABBIA, MARC; JOHNSON, SCOTT; KENGERI, SUBRAMANI; VENKATESAN, SURESH
To: GLOBALFOUNDRIES INC.
Reel/Frame 027370/0723 →
Continuity (1)
Related Publication 20130146986A1 · Jun 13, 2013