Diffusion sidewall for a semiconductor structure
View Patent ↗A method of forming diffusion sidewalls in a semiconductor structure and a semiconductor structure having diffusion sidewalls includes etching a trench into a semiconductor substrate to form first and second active regions, lining each trench with an oxide liner along exposed sidewalls of an active silicon region (RX) of the first and second active regions, removing the oxide liner formed along the exposed sidewalls of the RX region of one of the first and second active regions, forming diffusion sidewalls by epitaxially growing in-situ doped material within the exposed sidewalls of the RX region of the one of the first and second active regions, and forming an isolation region within the trench between the first and second active regions to electrically isolate the first and second active regions from each other.
1. A semiconductor structure comprising:
a plurality of semiconductor devices formed within active regions;
an isolation region separating the active regions; and
a diffusion sidewall formed of in-situ doped epitaxial grown material, the diffusion sidewall formed at an interface between one of the active regions and the isolation region;
wherein the in-situ doped material comprises one of:
boron (B) doped silicon (Si);
boron (B) doped silicon germanium (SiGe);
boron (B), carbon (C) doped silicon (Si); and
boron (B), carbon (C) doped silicon germanium (SiGe).
2. A semiconductor structure comprising:
a plurality of semiconductor devices formed within active regions;
an isolation region separating the active regions; and
a diffusion sidewall formed of in-situ doped epitaxial grown material, the diffusion sidewall formed at an interface between one of the active regions and the isolation region;
wherein the in-situ doped material comprises boron (B) doped or boron (B), carbon (C) doped silicon (Si) or silicon germanium (SiGe), wherein a lower boron concentration is formed towards an interface of the active region than towards an interface of the isolation region.
3. The semiconductor structure of claim 1 , wherein the one of the active regions comprises a n-type field effect transistor (NFET) device.
4. The semiconductor structure of claim 1 , wherein diffusion walls are vertically aligned along the sidewalls of the one of the active region.
5. The semiconductor structure of claim 4 , wherein the diffusion sidewalls are of a predetermined thickness ranging from approximately 50 to approximately 200 Å.
6. A semiconductor structure comprising:
a silicon-on-insulator (SOI) substrate;
first and second active regions formed of semiconductor material;
a shallow trench isolation region separating the first and second active regions; and
diffusion sidewalls formed of in-situ doped epitaxial grown material, the diffusion sidewalls are formed along sidewalls of an SOI layer formed at one of the first and second active regions and interfacing with the isolation region.