Memory device having trapezoidal bitlines and method of fabricating same
View Patent ↗A memory device and a method of fabrication are provided. The memory device includes a semiconductor substrate and a charge trapping dielectric stack disposed over the semiconductor substrate. A gate electrode is disposed over the charge trapping dielectric stack, where the gate electrode electrically defines a channel within a portion of the semiconductor substrate. The memory device includes a pair of bitlines, where the bitlines have a lower portion and a substantially trapezoidal shaped upper portion.
1. A method of fabricating a memory device onto a semiconductor substrate, the method comprising:
forming a charge trapping dielectric stack over the semiconductor substrate;
forming a gate electrode over the charge trapping dielectric stack;
forming a pair of liners adjacent to and in physical contact with lateral sidewalls of the charge trapping dielectric stack and the gate electrode, the pair of liners defining a pair of bitline openings; and
forming a pair of bitlines through the pair of bitline openings on opposite sides of the charge trapping dielectric stack and gate electrode, the pair of bitlines having substantially trapezoidal upper portions and substantially rectangular middle portions above the substrate, and a curved portion below the substrate.
2. The method of claim 1 , wherein forming the pair of bitlines comprises:
forming a pair of the lower portions disposed within the semiconductor substrate for the pair of bitlines.
3. The method of claim 1 , further comprising:
patterning the charge trapping dielectric stack and the gate electrode.
4. The method of claim 3 , wherein the patterning comprises:
patterning the gate electrode to have a substantially trapezoidal shape, and wherein the forming the pair of liners comprises:
forming the pair of liners adjacent to the lateral sidewalls of the charge trapping dielectric stack and the substantially trapezoidal shape, the pair of liners defining a pair of substantially trapezoidal shaped bitline openings.
5. The method of claim 4 , wherein each liner from among the pair of liners has a thickness of about 15 nanometers to about 25 nanometers.
6. The method of claim 3 , wherein the patterning comprises:
patterning the gate electrode to have a substantially rectangular shape, and wherein the forming comprises:
forming the pair of liners of non-uniform thickness adjacent to the lateral sidewalls of the charge trapping dielectric stack and the substantially rectangular shape, the pair of liners defining a pair of substantially trapezoidal shaped bitline openings.
7. The method of claim 3 , wherein the patterning comprises:
forming a first dielectric layer over the semiconductor substrate;
forming a charge trapping dielectric layer over the first dielectric layer; and
forming a second dielectric layer over the charge trapping dielectric layer.
8. The method of claim 1 , wherein forming the pair of bitlines comprises:
performing a bitline implant through each bitline opening from among the pair of bitline openings; and
silicidating each bitline from among the pair of bitlines to form the substantially trapezoidal upper portion and the substantially rectangular middle portion.
9. The method of claim 1 , wherein forming the pair of bitlines comprises:
performing a bitline implant through each bitline opening;
depositing a titanium glue layer within each bitline opening; and
performing a metal fill within each bitline opening to form the substantially trapezoidal upper portion and the substantially rectangular middle portion.
10. The method of claim 9 , wherein the metal fill is a tungsten fill.
11. The method of claim 1 , wherein forming the pair of bitlines comprises:
forming a layer of epitaxially grown silicon within each bitline opening; and
doping the epitaxially grown silicon in situ.
12. The method of claim 11 wherein the epitaxially grown silicon is doped in situ using phosphorus or arsenic.
13. The method of claim 11 , further comprising:
before forming the layer of epitaxially grown silicon, performing a bitline implant through each bitline opening.
14. The method of claim 1 , further comprising:
providing a contact in electrical communication with a top surface of the substantially trapezoidal portion of at least one bitline from among the pair of bitlines.
15. A method of fabricating a memory device onto a semiconductor substrate, the method comprising:
forming a charge trapping dielectric stack and a gate electrode onto the semiconductor substrate;
forming a pair of liners in physical contact with lateral sidewalls of the charge trapping dielectric stack and the gate electrode; and
forming a pair of bitlines in physical contact with the pair of liners on opposite sides of the charge trapping dielectric stack and gate electrode, wherein the pair of liners define shapes of the pair of bitlines, the pair of bitlines having a pair of lower portions disposed within the semiconductor substrate, and a pair of upper portions having substantially trapezoidal shapes, and a pair of middle portions having substantially rectangular shapes, wherein the pair of middle portions are in physical contact with the pair of lower portions.
16. The method of claim 15 , further comprising:
patterning the charge trapping dielectric stack and the gate electrode.
17. The method of claim 16 , wherein the patterning comprises:
forming a first dielectric layer over the semiconductor substrate;
forming a charge trapping dielectric layer over the first dielectric layer; and
forming a second dielectric layer over the charge trapping dielectric layer.
18. The method of claim 15 , wherein the forming the pair of liners comprises:
forming the pair of liners adjacent to the lateral sidewalls of the charge trapping dielectric stack, the pair of liners defining a pair of substantially trapezoidal shaped bitline openings and a pair of substantially rectangular shaped bitline openings below the substantially trapezoidal shaped bitline openings.
19. The method of claim 15 , wherein the forming the pair of liners comprises:
forming the pair of liners of non-uniform thickness adjacent to the lateral sidewalls of the charge trapping dielectric stack and a substantially rectangular shaped gate electrode, the pair of liners defining a pair of substantially trapezoidal shaped bitline openings.
20. A method of fabricating a memory device onto a semiconductor substrate, the method comprising:
forming a charge trapping dielectric stack and a gate electrode onto the semiconductor substrate;
forming a pair of liners in physical contact with lateral sidewalls of the charge trapping dielectric stack and the gate electrode, the pair of liners adjacent to the lateral sidewalls of the charge trapping dielectric stack, the pair of liners defining a pair of substantially trapezoidal shaped bitline openings and a pair of substantially rectangular shaped bitline openings below the substantially trapezoidal shaped bitline openings; and
forming a pair of bitlines in physical contact with the pair of liners on opposite sides of the charge trapping dielectric stack and gate electrode, wherein the pair of liners define shapes of the pair of bitlines.