Method and structure for gate height scaling with high-k/metal gate technology
View Patent ↗A method and structure to scale metal gate height in high-k/metal gate transistors. A method includes forming a dummy gate and at least one polysilicon feature, all of which are formed from a same polysilicon layer and wherein the dummy gate is formed over a gate metal layer associated with a transistor. The method also includes selectively removing the dummy gate while protecting the at least one polysilicon feature. The method further includes forming a gate contact on the gate metal layer to thereby form a metal gate having a height that is less than half a height of the at least one polysilicon feature.
1. A semiconductor structure, comprising:
a transistor comprising a metal gate on a high-k dielectric, the metal gate comprising a portion of a metal layer and a gate contact; and
a device comprising a polysilicon feature formed over a second portion of the metal layer and over a second portion of the high-k dielectric;
wherein a height of the metal gate is less than half the height of the polysilicon feature.
2. The semiconductor structure of claim 1 , further comprising a second device comprising a second polysilicon feature formed over a third portion of the metal layer and over a third portion of the high-k dielectric.
3. The semiconductor structure of claim 2 , wherein:
the device comprises a resistor; and
the second device comprises an e-fuse.
4. The semiconductor structure of claim 3 , wherein the polysilicon feature and the second polysilicon feature are respective patterned portions of a same polysilicon layer.
5. The semiconductor structure of claim 1 , further comprising a substrate including an active region and an isolation region.
6. The semiconductor structure of claim 5 , wherein:
the transistor is on the active region; and
the device is on the isolation region.
7. The semiconductor structure of claim 1 , further comprising an etch stop layer between the polysilicon feature of the device and the second portion of the metal layer.
8. The semiconductor structure of claim 7 , further comprising a silicon layer between the polysilicon feature of the device and the second portion of the metal layer.
9. The semiconductor structure of claim 1 , wherein the device comprises a passive device.
10. The semiconductor structure of claim 9 , further comprising a silicide contact on the polysilicon feature of the device.