Techniques of forming ohmic contacts on GaN light emitting diodes
View Patent ↗A method of forming ohmic contacts on a light emitting diode that features a surface treatment of a substrate includes exposing a surface of a p-type gallium nitride layer to an acid-containing solution and a buffered oxide etch process. A quantum well is formed in a gallium nitride substrate and a layer of p-type gallium nitride is deposited over the quantum well. The surface of the p-type gallium nitride is exposed to an acid-containing solution and then a buffered oxide etch process is performed to provide an etched surface. A metal stack including a layer of silver disposed between layers of platinum is then deposited.
1. A method of forming ohmic contacts on a light emitting diode having a double hetero-structure configuration, the method comprising:
forming an active layer on a gallium nitride substrate, the gallium nitride substrate is GaN;
depositing a layer of p-type gallium nitride upon the active layer, the p-type layer comprising magnesium;
providing an acid containing solution comprising nitric acid, hydrochloric acid, and water;
exposing a surface of said p-type gallium nitride to the acid-containing solution, forming a cleaned surface;
subjecting the cleaned surface to a buffered oxide etch process, forming an etched surface, the buffered oxide etch process comprising hydrofluoric acid and ammonium fluoride;
generating, upon the etched surface, a metal stack including a layer of silver and a layer of platinum; and
segmenting an LED from the GaN substrate and overlying layers using a laser.
2. The method as recited in claim 1 wherein the etched surface is free from contaminants.
3. The method as recited in claim 1 wherein said acid-containing solution consisting essentially of 15% of said nitric acid by weight, 27% of said hydrochloric acid by weight and 58% of said water by weight.
4. The method as recited in claim 1 wherein subjecting further includes providing said buffer oxide etch process with components consisting essentially of 2% hydrofluoric acid by weight and 8.75% ammonium fluoride by weight.
5. The method as recited in claim 1 wherein generating further includes depositing said layer of silver between the layer of platinum and another layer of platinum.
6. The method as recited in claim 1 further including producing a patterned photo resist on said surface followed by deposition of said metal stack.
7. The method as recited in claim 1 further including producing a patterned photo resist by covering a sub-portion of said cleaned surface with remaining regions of said cleaned surface being exposed followed by exposing said surface to said buffered oxide etch process.
8. The method as recited in claim 1 further including producing a patterned photo resist on said surface followed by depositing said metal stack on said patterned photo resist following exposing said cleaned surface to said buffered oxide etch process.
9. A method of forming ohmic contacts on a light emitting diode comprising:
forming an active layer on a gallium nitride substrate, the gallium nitride substrate is GaN;
depositing a layer of p-type gallium nitride upon the active layer;
providing an acid containing solution comprising nitric acid, hydrochloric acid, and water;
exposing a surface of said p-type gallium nitride to the acid-containing solution, forming a cleaned surface;
subjecting the cleaned surface to a buffered oxide etch process, forming an etched surface, the buffered oxide etch process comprising hydrofluoric acid and ammonium fluoride;
generating, upon the etched surface, a metal stack including a layer of silver and a layer of platinum; and
producing a patterned photo resist on said surface following deposition of said metal stack on said patterned photo resist followed by exposing said surface to said buffered oxide etch process and lifting-off said photo-resist to produce a plurality of spaced-apart metal stacks upon said substrate.
10. The method as recited in claim 1 wherein depositing further includes providing said layer with a p-type dopant concentration of 1e20 cm −3 .
11. A method of forming ohmic contacts on a light emitting diode, said method comprising:
forming a plurality of quantum wells on a gallium nitride substrate, the plurality of quantum wells comprising InGaN wells configured with barrier layers, the barrier layers comprising GaN;
depositing a layer of p-type gallium nitride upon said quantum wells, the p-type gallium nitride comprising magnesium;
exposing a surface of said p-type gallium nitride to an acid-containing solution, forming a cleaned surface;
producing a patterned photo resist on said cleaned surface covering sub-portions thereof with remaining regions being exposed;
subjecting said remaining regions to a buffered oxide etch process, forming etched regions;
generating a metal stack on said etched regions;
lifting-off said photo-resist to produce a plurality of spaced-apart metal stacks upon said substrate; and
segmenting said substrate using a laser into a plurality of discrete segments, each of which includes one of said plurality of metal stacks, each of the discrete segments corresponding to an LED device having ohmic contacts.
12. The method as recited in claim 11 wherein depositing further includes providing said layer with a p-type dopant concentration of 1e20 cm −3 .
13. The method as recited in claim 11 wherein exposing further includes providing nitric acid, hydrochloric acid and water in said acid-containing solution; wherein gallium nitride substrate comprising a surface having a dislocation density below 10 5 cm −2 and is substantially free of low-angle grain boundaries, or tilt boundaries, over a length scale of at least 3 millimeters.
14. The method as recited in claim 11 wherein exposing further includes providing nitric acid, hydrochloric acid and water in said acid containing solution, with said acid-containing solution consisting essentially of 15% of said nitric acid by weight, 27% of said hydrochloric acid by weight and 58% of said water by weight.
15. The method as recited in claim 11 wherein subjecting further includes providing said buffer oxide etch process with components consisting essentially of 2% hydrofluoric acid by weight and 8.75% ammonium fluoride by weight.
16. The method as recited in claim 11 wherein generating further includes depositing a layer of silver between two layers of platinum.
17. A method of forming ohmic contacts on a light emitting diode having a double hetero-structure configuration, said method comprising:
forming a plurality of quantum wells on a gallium nitride substrate;
depositing a layer of gallium nitride upon said quantum wells with a p-type dopant at a concentration of 1e20 cm −3 , the p-type dopant comprising magnesium;
exposing a surface of said p-type gallium nitride to an acid-containing solution, consisting essentially of nitric acid, hydrochloric acid and water, forming a cleaned surface;
producing a patterned photo resist on said cleaned surface exposing portions thereof;
subjecting said portions to a buffered oxide etch process, forming etched regions;
depositing a metal stack on said etched regions;
lifting-off said photo resist to produce a plurality of spaced-apart metal stacks upon said substrate; and
segmenting said substrate using a laser into a plurality of discrete segments, each of which includes one of said plurality of metal stacks, each of the discrete segments corresponding to an LED device having ohmic contacts.
18. The method as recited in claim 17 wherein exposing further includes providing said acid-containing solution with 15% of said nitric acid by weight, 27% of said hydrochloric acid by weight and 58% of said water by weight.
19. The method as recited in claim 17 wherein subjecting further includes providing said buffer oxide etch process with components consisting essentially of 2% hydrofluoric acid by weight and 8.75% ammonium fluoride by weight.
20. The method as recited in claim 17 wherein generating further includes depositing a layer of silver between two layers of platinum.
21. The method of claim 1 , wherein the gallium nitride substrate comprises a surface having a dislocation density below 10 5 cm −2 and is substantially free of low-angle grain boundaries, or tilt boundaries, over a length scale of at least 3 millimeters.
22. The method of claim 9 , wherein the gallium nitride substrate comprises a surface having a dislocation density below 10 5 cm −2 and is substantially free of low-angle grain boundaries, or tilt boundaries, over a length scale of at least 3 millimeters.
23. The method of claim 11 , wherein the gallium nitride substrate comprises a surface having a dislocation density below 10 5 cm −2 and is substantially free of low-angle grain boundaries, or tilt boundaries, over a length scale of at least 3 millimeters.
24. The method of claim 17 , wherein the gallium nitride substrate comprises a surface having a dislocation density below 10 5 cm −2 and is substantially free of low-angle grain boundaries, or tilt boundaries, over a length scale of at least 3 millimeters.
25. The method of claim 9 , wherein lifting-off exposes the substrate between adjacent metal stacks.
26. The method of claim 11 , wherein the substrate is exposed between adjacent metal stacks.
27. The method of claim 17 , wherein the substrate is exposed between adjacent metal stacks.
28. The method of claim 1 , wherein the active layer comprises one or more quantum wells.
29. The method of claim 9 , wherein the active layer comprises one or more quantum wells.
30. The method of claim 1 , comprising from 2 to 10 quantum wells.
31. The method of claim 9 , comprising from 2 to 10 quantum wells.
32. The method of claim 11 , comprising from 2 to 10 quantum wells.
33. The method of claim 17 , comprising from 2 to 10 quantum wells.
34. The method of claim 1 , wherein the metal stack comprises three separate metal layers.
35. The method of claim 9 , wherein the metal stack comprises three separate metal layers.
36. The method of claim 11 , wherein the plurality of spaced-apart metal stacks comprise three separate metal layers.
37. The method of claim 17 , wherein the plurality of spaced-apart metal stacks comprise three separate metal layers.
38. The method of claim 1 , wherein the active layer comprises one or more quantum wells.