Semiconductor structures including dual fins
Fin-FET (fin field-effect transistor) devices and methods of fabrication are disclosed. The fin-FET devices include dual fin structures that may form a channel region between a source region and a drain region. In some embodiments, the dual fin structures are formed by forming shallow trench isolation structures, using a pair of shallow trench isolation (STI) structures as a mask to define a recess in a portion of a substrate between the pair of STI structures, and recessing the pair of STI structures so that the resulting dual fin structures protrude from an active surface of the substrate. The dual fin structures may be used to form single-gate, double-gate, or triple-gate fin-FET devices. Electronic systems including such fin-FET devices are also disclosed.
1. A semiconductor structure, comprising:
a substrate comprising at least one region disposed between trenches formed in the substrate, the trenches extending into the substrate from a horizontal upper surface of the substrate;
a dielectric material within the trenches, the at least one region of the substrate extending above an upper surface of the dielectric material within the trenches; and
a recess comprising recess sidewalls defined in the at least one region, the recess extending into the at least one region from the horizontal upper surface of the substrate, at least a portion of the dielectric material within the trenches exposed through the recess sidewalls.
2. The semiconductor structure of claim 1 , wherein the substrate comprises silicon.
3. The semiconductor structure of claim 1 , wherein the trenches define non-vertical trench sidewalls.
4. The semiconductor structure of claim 1 , wherein each of the trenches extends deeper into the substrate than the recess extends.
5. The semiconductor structure of claim 1 , further comprising mask regions supported by the recess sidewalls.
6. The semiconductor structure of claim 1 , wherein the recess defines a non-planar lower recess surface.
7. The semiconductor structure of claim 1 , wherein the recess defines a lower recess surface depressed relative to the upper surface of the dielectric material within the trenches.
8. The semiconductor structure of claim 1 , wherein each of the trenches comprises trench sidewalls defining trench sidewall recesses therein, each of the trench sidewall recesses disposed vertically below at least one of the recess sidewalls.
9. A semiconductor structure, comprising:
a substrate comprising at least one elevated region disposed between and protruding above a pair of trenches defined in the substrate, the pair of trenches at least partially filled with a dielectric material; and
a recess defined in the at least one elevated region and protruding downward into the substrate, the recess exposing a portion of the dielectric material.
10. The semiconductor structure of claim 9 , wherein the recess defines a lower recess surface, the lower recess surface elevated relative to an upper planar surface of the dielectric material.
11. The semiconductor structure of claim 9 , wherein the recess defines a lower recess surface, the lower recess surface depressed relative to an upper surface of the dielectric material.
12. The semiconductor structure of claim 9 , wherein the dielectric material defines a dielectric protrusion disposed vertically below the at least one elevated region.
13. The semiconductor structure of claim 9 , wherein the recess defines a non-planar lower recess surface.