Method for manufacturing a light emitting diode with smooth surface for reflective electrode
View Patent ↗A light emitting diode comprising an epitaxial layer structure, a first electrode, and a second electrode. The first and second electrodes are separately disposed on the epitaxial layer structure, and the epitaxial layer structure has a root-means-square (RMS) roughness less than about 3 at a surface whereon the first electrode is formed.
1. A method for manufacturing a light emitting diode, comprising:
forming an epitaxial layer structure comprising a light emitting region, a first epitaxial layer and a second epitaxial layer, wherein the second epitaxial layer is a p-type epitaxial layer; and
depositing a first electrode and a second electrode on the epitaxial layer structure, the second electrode formed of a metal, the depositing comprising depositing the first electrode and the second electrode so that the first epitaxial layer is coupled between the first electrode and the second epitaxial layer, and the second epitaxial layer is between the second electrode and the first epitaxial layer,
wherein the second epitaxial layer of the epitaxial layer structure has a root-means-square (RMS) roughness less than about 3 nm at a surface whereon the second electrode is formed.
2. The method of claim 1 , wherein the second electrode is formed by depositing metals including at least one selected from a group consisting of Ag, Pt, Ni, Cr, Ti, Al, Pd, W, Ru, Rh, Mo, and their alloys.
3. The method of claim 1 , wherein the second electrode is formed on the second epitaxial layer and a surface of the second epitaxial layer where the second electrode is formed has a root-means-square (RMS) roughness less than about 3 nm.
4. The method of claim 1 , wherein the first epitaxial layer is an n-type epitaxial layer.
5. The method of claim 4 , wherein the active layer is formed between the n-type epitaxial layer and the p-type epitaxial layer.
6. The method of claim 1 , further comprising depositing a transparent ohmic contact layer formed between the second epitaxial layer and the second electrode.
7. The method of claim 6 , wherein a surface of the transparent ohmic contact layer adjacent to the second electrode has a root-means-square (RMS) roughness less than about 3 nm.
8. The method of claim 1 , wherein forming the epitaxial layer structure comprises forming the second epitaxial layer using MOCVD (Metal-Organic Chemical Vapor Deposition) of a metal-organic compound solution.
9. The method of claim 8 , wherein the second epitaxial layer is formed at a temperature no less than 950° C. at a growth rate no more than 150 Å/mim.
10. The method of claim 1 , wherein the first and second electrodes are deposited on opposite sides of the epitaxial layer structure.
11. The method of claim 1 , wherein the light emitting diode is a vertical light emitting diode device.
12. The method of claim 1 , further comprising removing a portion of the second epitaxial layer to expose a portion of the first epitaxial layer, and wherein the first and second electrodes are deposited on the same side of the epitaxial layer structure.
13. The method of claim 12 , wherein the light emitting diode is a flip-chipped lateral light emitting diode device.
14. The method of claim 12 , further comprising mounting the first and second electrodes on a sub-mount substrate.
15. The method of claim 1 , wherein the depositing of the second electrode comprises depositing silver on the second epitaxial layer by a physical evaporation process to form the second electrode.
16. A method for manufacturing a light emitting diode, comprising:
providing a substrate;
forming an epitaxial layer structure on the substrate comprising a light emitting region, bracketed between an n-type epitaxial layer and a p-type epitaxial layer, and
depositing a first electrode structure and a second electrode structure on the epitaxial layer structure, wherein the second electrode structure comprises a layer in direct contact with the p-type epitaxial layer, wherein the p-type epitaxial layer has a root-means-square (RMS) roughness less than about 3 nm where the p-type epitaxial layer contacts the layer of the second electrode structure.
17. The method of claim 16 , wherein the substrate is selected from a group consisting of a metal, a semiconductor material, and a ceramic.
18. The method of claim 17 , wherein the metal includes at least one selected from a group consisting of Cu, Mo, W, and Al, wherein the semiconductor material includes at least one selected from a group consisting of Si, GaAs, GaP, InP, and Ge, and wherein the ceramic includes at least one selected from a group consisting of Al 2 O 3 and AlN.
19. The method of claim 16 , wherein the layer of the second electrode structure in direct contact with the p-type epitaxial layer comprises a transparent conductive material.
20. The method of claim 16 , wherein the layer of the second electrode structure in direct contact with the p-type epitaxial layer comprises an opaque metal.
21. The method of claim 16 , further comprising removing the substrate from the epitaxial layer before depositing the first electrode for electrical contact with the first epitaxial layer.