Developable bottom antireflective coating composition and pattern forming method using thereof
The present invention relates to a developable bottom antireflective coating (BARC) composition and a pattern forming method using the BARC composition. The BARC composition includes a first polymer having a first carboxylic acid moiety, a hydroxy-containing alicyclic moiety, and a first chromophore moiety; a second polymer having a second carboxylic acid moiety, a hydroxy-containing acyclic moiety, and a second chromophore moiety; a crosslinking agent; and a radiation sensitive acid generator. The first and second chromophore moieties each absorb light at a wavelength from 100 nm to 400 nm. In the patterning forming method, a photoresist layer is formed over a BARC layer of the BARC composition. After exposure, unexposed regions of the photoresist layer and the BARC layer are selectively removed by a developer to form a patterned structure in the photoresist layer. The BARC composition and the pattern forming method are especially useful for implanting levels.
1. A bottom antireflective coating (BARC) composition comprising:
a first polymer comprising a first carboxylic acid moiety, a hydroxy-containing alicyclic moiety, and a first chromophore moiety which absorbs light at a wavelength selected from a range from 100 nm to 400 nm;
a second polymer comprising a second carboxylic acid moiety, a hydroxy-containing acyclic moiety, and a second chromophore moiety which absorbs light at a wavelength selected from a range from 100 nm to 400 nm;
a crosslinking agent joining the first polymer and the second polymer; and
a radiation sensitive acid generator.
2. The BARC composition of claim 1 , wherein the first carboxylic acid moiety and the second carboxylic acid moiety are each independently selected from the group consisting of: an acrylic acid monomer unit, a methacrylic acid monomer unit, a 4-vinylbenzoic acid monomer unit, a 2-carboxyethyl acrylate monomer unit, a 2-carboxyethyl methacrylate monomer unit, a mono-2-(methacryloyloxy)ethyl succinate monomer unit, and a mono-2-(acryloyloxy)ethyl succinate monomer unit.
3. The BARC composition of claim 1 , wherein the hydroxy-containing alicyclic moiety includes an adamantyl group.
4. The BARC composition of claim 3 , wherein the hydroxy-containing alicyclic moiety is a monomer unit derived from a monomer selected from the group consisting of the following structures:
wherein p represents a positive integer from 1 to 30.
5. The BARC composition of claim 1 , wherein the hydroxy-containing acyclic moiety is a monomer unit derived from a monomer selected from the group consisting of the following structures:
wherein s represents a positive integer from 1 to 30; R is a saturated carbon chain having a total number of carbon atoms from 1 to 30.
6. The BARC composition of claim 1 , wherein the first chromophore moiety and the second chromophore moiety each includes an aromatic group.
7. The BARC composition of claim 6 , wherein the first chromophore moiety and the second chromophore moiety each independently is a monomer unit derived from a monomer selected from the group consisting of the following structures:
wherein m represents a positive integer from 1 to 30; n represents an integer from 0 to 30.
8. The BARC composition of claim 1 , wherein the crosslinking agent is a glycoluril compound.
9. The BARC composition of claim 1 , wherein the radiation sensitive acid generator comprises at least one of an onium salt, a succinimide derivative, a diazo compound, and a nitrobenzyl compound.
10. The BARC composition of claim 1 , further comprising at least one of a solvent, a quencher, and a surfactant.
11. The BARC composition of claim 10 , wherein the solvent comprises at least one of an ether, an alcohol, a glycol ether, an aromatic hydrocarbon, a ketone, and an ester.
12. The BARC composition of claim 11 , wherein the BARC composition comprises:
about 0.1 to about 29 wt. % of the first polymer;
about 0.1 to about 29 wt. % of the second polymer;
about 0.1 to about 30 wt. % of the crosslinking agent, based on the total weight of the first and second polymers;
about 0.1 to about 30 wt. % of the radiation sensitive acid generator, based on the total weight of the first and second polymers; and
about 70 to about 99.9 wt. % of the solvent.
13. The BARC composition of claim 12 , wherein the weight percentage of the first polymer is higher than the weight percentage of the second polymer.