Integrated circuits having place-efficient capacitors and methods for fabricating the same
An integrated circuit having a place-efficient capacitor includes a lower capacitor electrode having a surface area comprised of an inner surface area of a partial opening and a via opening formed in a patterned dielectric layer on a semiconductor substrate, a capacitor insulating layer overlying the lower capacitor electrode, and an upper capacitor electrode including a metal fill material filling the partial opening and the via opening and having a surface area that includes the inner surface area of the partial opening and via opening.
1. An integrated circuit having a place-efficient capacitor comprising:
a lower capacitor electrode having a surface area comprising an inner surface area of both a partial opening and a via opening formed in a patterned dielectric layer on a semiconductor substrate, wherein:
the inner surface area of the partial opening is comprising a first portion and a second portion,
the via opening separates the first portion from the second portion,
the via opening is formed over a conductive feature,
the via opening extends downward from the partial opening toward the conductive feature in a direction perpendicular to a surface of the semiconductor substrate and for a first length sufficiently long that at least of portion of the lower capacitor electrode in the via opening is in direct contact with the conductive feature,
the first portion and the second portion each comprises a substrate-parallel surface that is parallel to the surface of the semiconductor substrate,
the patterned dielectric layer comprises a patterned porosity,
the patterned porosity comprises at least one extended opening that extends downward from the substrate-parallel surface of the first portion and parallel to the via opening and at least one extended opening that extends downward from the substrate-parallel surface of the second portion and parallel to the via opening, and
each of the at least one extended openings extends downward for a second length that is insufficiently long to allow any portion of the lower capacitor electrode therein to directly contact the conductive feature;
a capacitor insulating layer overlying the lower capacitor electrode; and
an upper capacitor electrode comprising a metal fill material filling a remaining portion of the partial opening and the via opening and having a surface area comprising the inner surface area of an outer surface of the capacitor insulating layer.
2. The integrated circuit of claim 1 , wherein the patterned dielectric layer comprises an interlayer dielectric (ILD) layer.
3. The integrated circuit of claim 1 , wherein the conductive feature comprises copper, tungsten, aluminum, silver, or gold.
4. The integrated circuit of claim 1 , wherein the conductive feature is connected to a metal line, a via, a contact plug, or a silicide region.
5. The integrated circuit of claim 1 , wherein the lower capacitor electrode comprises a first conductive layer overlying the patterned dielectric layer.
6. The integrated circuit of claim 5 , wherein the first conductive layer comprises a diffusion barrier layer.
7. The integrated circuit of claim 5 , wherein the first conductive layer has a thickness of about 5 nm to about 20 nm.
8. The integrated circuit of claim 5 , wherein the first conductive layer comprises titanium or titanium-nitride.
9. The integrated circuit of claim 1 , wherein the upper capacitor electrode comprises a second conductive layer overlying the patterned dielectric layer.
10. The integrated circuit of claim 9 , wherein the second conductive layer comprises copper, silver, tungsten, gold, or aluminum.
11. The integrated circuit of claim 10 , wherein the second conductive layer consists of a single metal layer.
12. The integrated circuit of claim 10 , wherein the second conductive layer comprises two or more metal layers.
13. The integrated circuit of claim 1 , wherein the upper capacitor electrode overlies the capacitor insulating layer.