Resistive switching devices having alloyed electrodes and methods of formation thereof
View Patent ↗In accordance with an embodiment of the present invention, a resistive switching device comprises a bottom electrode, a switching layer disposed over the bottom electrode, and a top electrode disposed over the switching layer. The top electrode comprises an alloy of a memory metal and an alloying element. The top electrode provides a source of the memory metal. The memory metal is configured to change a state of the switching layer.
1. A resistive switching device comprising:
a bottom electrode;
a switching layer comprising a memory metal disposed over the bottom electrode; and
a top electrode disposed over the switching layer, the top electrode comprising an alloy of the memory metal and an alloying element, the top electrode providing a source of the memory metal in the switching layer, the memory metal being configured to change a state of the switching layer, wherein the concentration of the alloying element has a graded profile within the top electrode.
2. The device of claim 1 , wherein the alloying element comprises copper and the memory metal comprises silver.
3. The device of claim 1 , wherein the alloying element comprises an element selected from the group consisting of indium, aluminum, nickel, and magnesium.
4. The device of claim 1 , wherein the atomic ratio of the alloying element to the memory metal in the top electrode is about 5% atomic fraction to about 50% atomic fraction.
5. The device of claim 1 , wherein the total number of atoms of the alloying element in the top electrode is about 10% to about 50% of the total number of atoms in the switching layer.
6. The device of claim 1 , wherein the alloying element has a peak concentration proximate an interface between the switching layer and the top electrode.
7. The device of claim 1 , wherein the alloying element has a peak concentration at a top surface of the top electrode, the top surface being opposite to a bottom surface at an interface between the switching layer and the top electrode.
8. The device of claim 1 , wherein an interface between the switching layer and the top electrode has a surface roughness less than about 5 nm.
9. The device of claim 1 , wherein the top electrode has a length along an interface between the switching layer and the top electrode, wherein the top electrode comprises a plurality of grains, and wherein the length of the top electrode is at least 10 times an average diameter of the plurality of grains along the interface.
10. The device of claim 1 , wherein the top electrode comprises an amorphous material.
11. The device of claim 1 , wherein the resistive switching device comprises a conductive bridging random access memory.
12. The device of claim 1 , wherein the resistive switching device comprises a metal oxide memory.
13. A resistive switching device comprising:
an inert electrode;
an electrochemically active electrode spaced apart from the inert electrode, the electrochemically active electrode providing a source of an electrochemically active memory metal, the electrochemically active electrode comprising an alloy of the memory metal and an alloying element; and
a switching layer comprising the memory metal and disposed between the inert electrode and the electrochemically active electrode, wherein the memory metal is configured to change a state of the switching layer, wherein the alloying element has a varying concentration profile within the electrochemically active electrode, wherein the switching layer is a conductive switching layer of a conductive bridging memory, and wherein the electrochemically active memory metal is configured to be electrochemically active in the conductive switching layer of the conductive bridging memory.
14. The device of claim 13 , wherein the memory metal comprises silver and wherein the alloying element comprises copper.
15. The device of claim 14 , wherein the atomic ratio of the alloying element to the memory metal in the electrochemically active electrode is about 5% atomic fraction to about 50% atomic fraction.
16. The device of claim 14 , wherein the alloying element has a maximum concentration proximate an interface between the switching layer and the electrochemically active electrode.
17. The device of claim 14 , wherein the alloying element has a maximum concentration at a top surface of the electrochemically active electrode, the top surface being opposite to a bottom surface at an interface between the switching layer and the electrochemically active electrode.
18. The device of claim 14 , wherein an interface between the switching layer and the electrochemically active electrode has a surface roughness between about 0.3 nm to about 3 nm.
19. The device of claim 14 , wherein the electrochemically active electrode has a length along an interface between the switching layer and the electrochemically active electrode, wherein the electrochemically active electrode comprises a plurality of grains, and wherein the length of the electrochemically active electrode is at least 10 times an average diameter of the plurality of grains along the interface.
20. The device of claim 13 , wherein the alloying element comprises an element from the group consisting of ruthenium, titanium, indium, aluminum, nickel, magnesium, and germanium.
21. The device of claim 1 , wherein the alloying element comprises an element selected from the group consisting of ruthenium, titanium, and germanium.
22. The device of claim 1 , wherein the alloying element has a uniform profile within the top electrode.
23. The device of claim 1 , wherein the top electrode comprises columnar grains.
24. The device of claim 1 , wherein a foot print of the switching layer is less than a foot print of the top electrode.
25. The device of claim 1 , wherein the top electrode comprises a recrystallized material region.
26. A resistive switching device comprising:
an inert electrode;
an electrochemically active electrode spaced apart from the inert electrode, the electrochemically active electrode providing a source of an electrochemically active memory metal, the electrochemically active electrode comprising an alloy of the memory metal and an alloying element, wherein the concentration of the alloying element has a graded profile within the electrochemically active electrode; and
a switching layer comprising the memory metal and disposed between the inert electrode and the electrochemically active electrode, wherein the memory metal is configured to change a state of the switching layer.
27. The device of claim 26 , wherein the alloying element comprises copper and the memory metal comprises silver.
28. The device of claim 26 , wherein the alloying element comprises an element selected from the group consisting of indium, aluminum, nickel, and magnesium.
29. The device of claim 26 , wherein the atomic ratio of the alloying element to the memory metal in the electrochemically active electrode is about 5% atomic fraction to about 50% atomic fraction.
30. The device of claim 26 , wherein the total number of atoms of the alloying element in the electrochemically active electrode is about 10% to about 50% of the total number of atoms in the switching layer.
31. The device of claim 26 , wherein the alloying element has a peak concentration proximate an interface between the switching layer and the electrochemically active electrode.
32. The device of claim 26 , wherein the alloying element has a peak concentration at a top surface of the electrochemically active electrode, the top surface being opposite to a bottom surface at an interface between the switching layer and the electrochemically active electrode.