Light emitting diodes including barrier sublayers
View Patent ↗Semiconductor light emitting devices, such as light emitting diodes, include a substrate, an epitaxial region on the substrate that includes a light emitting region such as a light emitting diode region, and a multilayer conductive stack including a reflector layer, on the epitaxial region. A barrier layer is provided on the reflector layer and extending on a sidewall of the reflector layer. The multilayer conductive stack can also include an ohmic layer between the reflector and the epitaxial region. The barrier layer further extends on a sidewall of the ohmic layer. The barrier layer can also extend onto the epitaxial region outside the multilayer conductive stack. The barrier layer can be fabricated as a series of alternating first and second sublayers.
1. A semiconductor light emitting device comprising:
a semiconductor region that comprises a light-emitting region;
a reflector layer on the semiconductor region; and
a conductive barrier layer on the reflector layer, the conductive barrier layer comprising a plurality of first spaced-apart sublayers.
2. A light emitting device according to claim 1 wherein the conductive barrier layer that comprises the plurality of first spaced-apart sublayers further extends onto the semiconductor region outside the reflector layer.
3. A light emitting device according to claim 1 wherein the conductive barrier layer comprises a plurality of the first and second alternating sublayers.
4. A light emitting device according to claim 3 wherein the first sublayers include grain boundaries therein and wherein the second sublayers are substantially free of grain boundaries.
5. A light emitting device according to claim 3 wherein the first sublayers comprise titanium tungsten and wherein the second sublayers comprise platinum, titanium and/or nickel.
6. A light emitting device according to claim 3 wherein the first sublayers are configured to reduce migration of metal from the reflector layer and wherein the second sublayers are configured to prevent at least some grain boundaries in the first sublayers from propagating thereacross.
7. A light emitting device according to claim 3 wherein the first sublayers are sufficiently thick to reduce migration of metal from the reflector layer but sufficiently thin to prevent at least some cracking of the first sublayers and wherein the second sublayers are sufficiently thick to prevent at least some grain boundaries in the first sublayers from propagating thereacross but sufficiently thin so as not to degrade contact resistance of the light emitting device.
8. A light emitting device according to claim 3 wherein the first sublayers comprise titanium tungsten and wherein the second sublayers comprise platinum, titanium and/or nickel.
9. A light emitting device according to claim 1 further comprising:
a bond on the conductive barrier layer; and
a submount on the bond, opposite the conductive barrier layer.
10. A light emitting device according to claim 9 wherein the semiconductor region comprises n-type and p-type layers, and wherein the reflector layer is adjacent the p-type layer and between the p-type layer and the submount.
11. A light emitting device according to claim 10 wherein the n-type and p-type layers each comprise a Group III nitride.
12. A light emitting device according to claim 9 wherein the bond comprises a thermocompression bond.
13. A light emitting device according to claim 9 wherein the bond comprises solder.
14. A light emitting device according to claim 13 wherein the solder comprises tin and/or gold.
15. A light emitting diode according to claim 1 wherein the reflector layer comprises aluminum and/or silver.
16. A light emitting device according to claim 1 further comprising:
a transparent ohmic contact between the semiconductor region and the reflector layer.
17. A light emitting device according to claim 16 wherein the transparent ohmic contact comprises metal.
18. A light emitting device according to claim 17 wherein the transparent ohmic contact that comprises metal is between about 10Å and about 100Å in thickness.
19. A light emitting device according to claim 16 wherein the reflector layer comprises aluminum and/or silver and the transparent ohmic contact comprises platinum, palladium, nickel, titanium and/or gold.
20. A light emitting device according to claim 16 wherein the reflector layer comprises silver and the transparent ohmic contact comprises nickel and/or platinum.
21. A light emitting device according to claim 1 wherein the first sublayers include grain boundaries therein that are arranged such that the grain boundaries define an offset brick wall structure in the first sublayers.
22. A light emitting device according to claim 1 further comprising an ohmic layer between the reflector layer and the conductive barrier layer.
23. A light emitting device according to claim 1 wherein the semiconductor region comprises n-type and p-type layers and an active region therebetween, and wherein the reflector layer is adjacent the p-type layer.
24. A light emitting device according to claim 23 wherein the n-type and p-type layers and the active region each comprises a Group III nitride.
25. A light emitting device according to claim 1 wherein the semiconductor region comprises gallium nitride.
26. A light emitting device according to claim 1 wherein the semiconductor region comprises an epitaxial region on a substrate.
27. A light emitting device according to claim 26 wherein the substrate comprises silicon carbide and the epitaxial region comprises gallium nitride.